Charged-Particle Beam Writing Block Size Optimization
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Solution Overview
Problem
Conventional methods for calculating stage speed in variable stage speed writing for semiconductor devices result in increased stage speed differences between adjacent blocks, leading to reduced throughput due to suboptimal block size usage.
Innovation Solution
An apparatus and method that dynamically determine an optimal block size by calculating the average write speed and write speed variation across blocks, modifying the block size to ensure equal or less than a predetermined write speed variation, and calculating stage speeds for each block of the optimal size to minimize speed differences and enhance throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a fixed block size is used for calculating stage speed in variable stage speed writing, then the calculation process is simple, but the stage speed difference between adjacent blocks increases and throughput cannot be improved
Solution Approach 1:
The patent applies dynamics by making the block size adaptive rather than fixed. The block size determining unit dynamically adjusts the block size based on write speed variations, allowing the system to optimize throughput for different writing conditions while maintaining manageable calculation complexity through automated adaptation.
Solution Approach 2:
The patent changes the parameter of block size from a fixed value to a dynamically determined value based on write speed characteristics. By modifying the block size parameter according to actual writing conditions and speed variations, the system achieves improved throughput without excessive complexity through systematic parameter optimization.
2Loss of time
If the block size is increased to reduce the number of blocks, then the calculation complexity decreases, but the stage cannot be accelerated between blocks and write time increases
Solution Approach 1:
The patent optimizes the block size parameter to achieve the best balance between write time and throughput. By determining the optimal block size based on write speed variations rather than using fixed or excessively large blocks, the system minimizes write time while maintaining high throughput through efficient stage acceleration between blocks.
Solution Approach 2:
The patent uses a moderate block size that is neither too small nor too large, but optimally sized based on writing conditions. This partial action approach ensures that blocks are small enough to allow frequent acceleration opportunities for improved throughput, while being large enough to maintain efficient calculation and reduce the total number of blocks.
3Productivity
If the block size is decreased to allow more frequent stage acceleration, then throughput may be improved, but the calculation complexity and processing overhead increase
Solution Approach 1:
The system performs self-service by automatically determining the optimal block size through the block size determining unit. The apparatus uses its own write speed data to calculate and adjust block sizes without external intervention, achieving improved throughput while managing calculation complexity through automated self-optimization based on actual writing conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach optimizes throughput by reducing write speed variations and improving stage movement efficiency, leading to shorter write times and increased productivity in charged-particle beam writing processes.
Implementation Method 1
a charged-particle beam writing apparatus for radiating a charged-particle beam onto a writing area of a sample placed on a stage while moving the stage at varied speeds
Data Source
AI summary
An average write speed M is calculated by averaging write speeds for blocks of a tentative block size La, and write speed variation σ of the blocks with respect to the average write speed M is calculated (Step S12). A maximum speed Vmax is calculated by accelerating and then decelerating (or decelerating and then accelerating) a stage when moving the stage by the width of one of the blocks of the tentative block size La (Step S13). When the relationship “Vmax−M≧σ” does not hold, the tentative block size La is increased (Step S15). When the relationship “Vmax−M≧σ” holds, the tentative block size La is set as an optimal block size Lb (Step S16).