Charged Particle Beam Writing Data Parallel Transfer
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Solution Overview
Problem
The existing charged particle beam writing apparatuses face a bottleneck in data transfer speed due to sequential data transfer processing, even when data conversion is performed in parallel, leading to decreased throughput as the data amount increases.
Innovation Solution
A charged particle beam writing apparatus and method that divides and distributes processed data into equal data groups, transmitting them in descending order of writing processing, allowing parallel data transfer and storage across multiple memories, and outputting them in writing order to enhance transfer speed and throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If data conversion processing is performed in parallel across multiple computers, then data conversion efficiency is improved, but data transfer speed remains bottlenecked by sequential transfer processing
Solution Approach 1:
The patent divides the writing region into multiple small regions and performs data conversion processing for each region in parallel across multiple computers. The processed data is then segmented into multiple data groups that can be transmitted simultaneously through different channels, converting a sequential bottleneck into parallel processing streams.
Solution Approach 2:
The patent introduces a new dimension of parallelism by transmitting multiple data groups simultaneously through different transmission channels. Instead of transferring data sequentially along a single channel, the system utilizes multiple transmission paths operating in parallel, effectively adding a dimensional aspect to the data transfer process.
2Productivity
If data amount increases due to smaller pattern data, then pattern integration increases, but data transfer time increases and degrades writing throughput
Solution Approach 1:
The patent segments the large volume of pattern data into multiple smaller data groups, each corresponding to a specific small region of the writing region. This segmentation allows the total data transfer time to be distributed across multiple parallel transmission channels, preventing the cumulative data volume from creating a sequential bottleneck.
Solution Approach 2:
The patent ensures continuous data transfer by maintaining multiple parallel transmission channels operating simultaneously. As data groups are processed and transmitted in parallel, the system maintains continuous useful action throughout the data transfer process, eliminating idle waiting periods that would occur in sequential transfer.
Data Source
AI summary
A charged particle beam writing apparatus includes a division/distribution processing unit to divide and distribute processed data into data groups each having an approximately equal data amount respectively, transmitting units to transmit the processed data of the groups such that processed data is transmitted in descending order with respect to order of writing processing for each data group and the groups are transmitted in parallel, memories to store the processed data of the groups such that each of the memories stores processed data of each different one of the groups, a writing order data output unit to output them, regardless of data group and in order of writing processing, and a writing unit to write a pattern on a target workpiece with a charged particle beam, based on the processed data output in the order of writing processing.