Charged Particle Beam Writing Apparatus Data Transmission
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Solution Overview
Problem
In electron beam writing apparatuses, delayed data transmission to the deflection control circuit causes interruptions in the writing process, leading to increased writing time as the stage position needs to be restored before resuming writing, resulting in inefficiencies during the creation of high-precision semiconductor device patterns.
Innovation Solution
Implementing a data transmission method where data conversion processing is performed in parallel for multiple processing regions, with each region's data being divided into n parts and transmitted sequentially, allowing the (n−1)th divided data to be transmitted while the n-th divided data is being input, enabling continuous writing without delays by using a plurality of conversion processing units, a transmission unit, and a deflection control circuit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If data transmission is performed sequentially after complete data conversion, then data accuracy is maintained, but writing time increases due to interruptions and stage position restoration
Solution Approach 1:
The patent divides writing data into multiple divided data segments corresponding to different processing regions. Multiple conversion processing units process different segments in parallel, and the transmission unit transmits divided data sequentially to the deflection control circuit. This segmentation allows continuous writing without interruptions while maintaining data accuracy through ordered transmission.
Solution Approach 2:
The patent performs data conversion processing in advance for multiple processing regions before writing begins. The conversion processing units prepare divided data segments beforehand, so that when writing starts, the transmission unit can continuously transmit data without waiting for conversion to complete, eliminating writing interruptions.
2Reliability
If data conversion processing is performed for the entire writing region before transmission, then data completeness is ensured, but writing efficiency decreases due to sequential processing
Solution Approach 1:
The writing region is divided into multiple processing regions, and data is segmented accordingly. Multiple conversion processing units handle different segments simultaneously in parallel, improving processing efficiency while ensuring each segment is completely converted before transmission.
Solution Approach 2:
The patent enables continuous data transmission to the deflection control circuit by dividing data into segments and transmitting them sequentially without interruption. The transmission unit continuously outputs divided data segments to maintain uninterrupted writing, eliminating idle time between data transmissions.
3Speed
If multiple conversion processing units operate in parallel, then processing speed increases, but data transmission complexity increases
Solution Approach 1:
The transmission unit serves as an intermediary between multiple conversion processing units and the deflection control circuit. It receives divided data segments from multiple processing units, manages their sequential transmission in the correct order, and delivers them to the deflection control circuit, simplifying the overall system architecture despite parallel processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for uninterrupted and efficient data transmission to the deflection control circuit, reducing the time required for writing by enabling the writing process to start earlier, thus improving the overall writing efficiency and reducing the need for stage position restoration.
Implementation Method 1
a charged particle source configured to emit charged particles
Implementation Method 2
a deflector configured to deflect the charged particle beam
Data Source
AI summary
A charged particle beam writing apparatus includes plural conversion processing units to perform data conversion processing in parallel for writing data of each processing region obtained by virtually dividing the writing region of a target object into plural processing regions, a transmission unit to input a part of processing data of one of the plural processing regions for which data conversion processing has been performed, one part at a time, totally as n divided processing data, and sequentially transmit the n divided processing data such that the (n−1) th divided processing data is transmitted while the n-th divided processing data is being input, a deflection control circuit to control a deflection amount for deflecting a charged particle beam, based on one of the n divided processing data transmitted sequentially, and a writing unit to write a pattern by deflecting the charged particle beam based on the deflection amount.