Charged Particle Beam Writing Apparatus Dynamic Region Division
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Solution Overview
Problem
Existing electron beam writing apparatuses face challenges in efficiently processing complex layout data and preventing processing speed decreases and unexpected stops due to large data amounts in the chip region during the lithography process for semiconductor device manufacturing.
Innovation Solution
A charged particle beam writing apparatus that includes a data storage unit, a dividing unit to split the chip region into process regions, a shot data generating unit for distributed processing using multiple computing processors, and a determining and instructing unit to compare output data thresholds, allowing for automatic division of process regions when data exceeds a predetermined amount, ensuring continuous data processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If distributed processing is performed using multiple computing processors, then processing efficiency is improved, but processing speed decreases and unexpected stops occur when data amount exceeds capacity
Solution Approach 1:
The patent divides the chip region into multiple process regions and further segments each process region into sub-process regions. This hierarchical segmentation allows the system to process data in smaller, manageable units that can be handled by multiple computing processors simultaneously without overwhelming any single processor, thus maintaining processing continuity while improving efficiency
Solution Approach 2:
The patent implements dynamic adjustment of process region division based on data amount. When a process region exceeds a predetermined data threshold, the determining and instructing unit dynamically instructs the dividing unit to further divide that region into sub-process regions. This dynamic adaptation ensures that processing capacity matches data volume, preventing speed decreases and unexpected stops
2Productivity
If the chip region is divided into process regions for distributed processing, then data processing capability is improved, but device complexity increases
Solution Approach 1:
The patent introduces a modular hierarchical structure with a dividing unit, shot data generating unit, determining and instructing unit, and writing unit. Each unit has a specific function and can operate semi-independently, which organizes complexity into manageable modules rather than a monolithic system, making the complex distributed processing architecture more controllable and maintainable
Solution Approach 2:
The determining and instructing unit monitors the data amount in each process region and provides feedback to the dividing unit. When the data amount exceeds a threshold, feedback triggers further division into sub-process regions. This feedback mechanism automates the complexity management, reducing the need for manual intervention and simplifying operation despite the increased system complexity
Data Source
AI summary
There is provided a charged particle beam writing apparatus in which data processing is optimized by automatically dividing process regions on which parallel distributed processing is performed. A charged particle beam writing apparatus includes: a data storage unit to which layout data defining a plurality of figure patterns in a chip region is input and which stores the layout data; a dividing unit configured to divide the chip region into a plurality of process regions; a shot data generating unit configured to perform distributed processing on pattern data in the process regions using a plurality of computing processors so as to convert the pattern data to shot data for shooting a charged particle beam onto a target object; a determining and instructing unit configured to compare an amount of output data from each of the computing processors with a predetermined threshold, and when the amount of the output data is larger than the threshold, instruct corresponding one of the computing processors to divide corresponding one of the process regions and continue the data processing; and a writing unit configured to write on the target object using the shot data.