Charged Particle Beam Writing Apparatus Mesh Density Calculation
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Solution Overview
Problem
The increasing miniaturization and high density of patterns in semiconductor device manufacturing lead to longer affiliation judgment processing times, delaying the calculation of pattern area density and increasing writing time due to the need for redundant affiliation judgment processing across multiple data processing regions.
Innovation Solution
A charged particle beam writing apparatus and method that divides a chip region into data processing blocks, extracts cells with reference positions within each block, generates frames to surround these cells, divides the frames into mesh regions, calculates and combines area densities, and uses these calculations to determine the dose of the charged particle beam for precise pattern writing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the chip region is divided into multiple data processing regions and affiliation judgment processing is performed in each region, then the pattern area density can be calculated locally, but the calculation time increases due to redundant processing of cells that extend over multiple regions
Solution Approach 1:
The chip region is divided into multiple data processing blocks, and each block is further divided into mesh regions. This segmentation allows the affiliation judgment processing to be performed only once for each cell in its containing block, rather than redundantly in each overlapping block, thereby reducing total calculation time while maintaining local density calculation capability.
Solution Approach 2:
Cells are extracted from the set of all patterns and assigned to specific data processing blocks based on containment relationships. By extracting and assigning cells to specific blocks where they are fully contained, the invention eliminates redundant affiliation judgment processing that would otherwise occur in multiple overlapping blocks, reducing calculation time while preserving measurement precision.
2Manufacturing precision
If the data processing region size is reduced to accommodate miniaturization and high density patterns, then more regions are needed to cover the chip, but the number of redundant affiliation judgment operations increases across multiple regions
Solution Approach 1:
The invention divides the chip into multiple data processing blocks and further segments each block into mesh regions. This hierarchical segmentation allows precise local density calculation in small regions while avoiding redundant processing by ensuring each cell is assigned to only one block for affiliation judgment, thereby maintaining manufacturing precision without sacrificing productivity.
Solution Approach 2:
The invention performs preliminary affiliation judgment processing for each cell in its containing data processing block before proceeding to density calculations. By performing this assignment action preliminarily and storing the results, subsequent density calculations can reuse this information without repeating the affiliation judgment, thus maintaining precision while improving writing speed.
Data Source
AI summary
A charged particle beam writing apparatus includes a unit to divide a chip region into first data processing blocks, a unit to, in each block, extract a cell whose reference position is located in the block concerned from cells each including at least one figure pattern, a unit to, for each block, generate a first frame that surrounds the block concerned and the cell extracted, a unit to, for each first frame, divide the inside of the first frame concerned into mesh regions and calculate an area density of a figure pattern in each mesh, a unit to combine area densities of mesh regions which are overlapped with each other and between different first frames, a unit to calculate a dose of beam by using the area density, and a unit to write a pattern on a target workpiece by irradiating the beam of the dose calculated.