Beamlet Redirection for Imaging Aberration Correction
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Solution Overview
Problem
Existing imaging technologies for beam sources, such as those used in lithography and microscopy, suffer from imaging aberrations that degrade the precision of the image formed, particularly due to the non-uniform deflection and focusing of beamlets.
Innovation Solution
The method involves using a redirecting organ, such as a macrolens or deflectors, to adjust the beamlets' redirection based on their distance from the central axis, ensuring they converge at a common point with equal optical path lengths and phase differences of 0 or 2π, while employing adjustable focusing means before and after the redirecting organ to minimize spherical and chromatic aberrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a beam splitter is used to divide the beam into beamlets, then the imaging capability is improved, but imaging aberrations occur that degrade image precision
Solution Approach 1:
The beam is divided into multiple beamlets by the beam splitter, with each beamlet being independently redirected and focused. This segmentation allows for precise control of individual beamlets to converge at the common imaging point, overcoming the aberrations that would affect the entire beam uniformly.
Solution Approach 2:
Each beamlet is given different redirection characteristics based on its position relative to the central axis. The redirecting organ adjusts the deflection angle of each beamlet locally, ensuring that beamlets from different parts of the beam are focused precisely at the common imaging point, compensating for position-dependent aberrations.
2Device complexity
If beamlets are deflected uniformly, then the device structure is simple, but spherical and chromatic aberrations increase
Solution Approach 1:
The redirecting organ changes the deflection parameter (deflection angle) of each beamlet based on its position. Beamlets farther from the central axis are deflected by different amounts compared to those near the center, optimizing the convergence at the imaging point and reducing spherical and chromatic aberrations.
Solution Approach 2:
The system transitions from static uniform deflection to dynamic position-dependent deflection. The redirecting organ actively adjusts the deflection characteristics of each beamlet according to its position, allowing the system to adapt and compensate for various types of imaging aberrations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly improves image precision by compensating for aberrations, ensuring coherent and focused beamlets converge at a common imaging point, thereby enhancing the overall imaging quality.
Implementation Method 1
a macrolens or a set of deflectors for deflecting the individual beamlets into the desired direction
Implementation Method 2
a first array of focusing means is provided before the redirecting organ and a second array of focusing means is provided after the redirecting organ
Data Source
AI summary
A method for forming an image of a beam source that during operation provides a beam, and wherein the beam is split so as to divide the beam into beamlets, wherein a redirecting organ is used with which each individual beamlet is redirected to a predetermined degree with the extent of redirection of each beamlet by means of the redirecting organ depending on the distance of that beamlet to a central axis of the beam, such that the beamlets converge in a common point with the beamlets from the beam source being focused to foci located in the redirecting organ, and with the beamlets originating from these foci being focused in the common imaging point.