Bellows Chamber Docking for Vacuum Isolation in Substrate Transfer
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Solution Overview
Problem
Vibrations from vacuum pumps and equipment can cause errors and damage during substrate processing, particularly affecting imaging quality in vacuum environments.
Innovation Solution
A chamber docking apparatus with a length-adjustable passage using a bellows structure and length-adjusting driver to connect chambers, minimizing vibration transmission through a substrate transfer apparatus with a transfer robot and independent pressure control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If chambers are fixed to each other to maintain vacuum state, then vacuum stability is improved, but vibration transmission increases
Solution Approach 1:
The patent employs a bellows structure as a flexible connection element between chambers. The bellows can expand and contract to accommodate vibrations while maintaining the vacuum seal, thus isolating vibration transmission between chambers while preserving vacuum stability.
Solution Approach 2:
The bellows acts as an intermediary element between fixed chambers, providing a flexible coupling that transmits no vibrations. This mediator allows the chambers to remain connected for vacuum purposes while preventing harmful vibration transmission.
2Stability of the object's composition
If passage length is fixed to maintain vacuum connection, then connection stability is improved, but adaptability decreases
Solution Approach 1:
The passage incorporates a bellows structure that can dynamically adjust its length through expansion and contraction. This dynamic element allows the passage to adapt to different connection requirements while maintaining stable vacuum sealing, resolving the contradiction between fixed length and adaptability.
3Reliability
If chambers are rigidly connected for stable substrate transport, then transport reliability is improved, but vibration-induced errors increase
Solution Approach 1:
The bellows structure provides a flexible connection that maintains reliable substrate transport while absorbing vibrations. The flexible nature of the bellows prevents vibration transmission to the substrate processing areas, thereby preserving manufacturing precision.
Solution Approach 2:
The bellows converts the harmful vibration energy into beneficial elastic deformation, absorbing vibrations that would otherwise cause precision errors. This transforms the potential harm into a protective mechanism that maintains both transport reliability and processing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures stable substrate transport and processing by isolating vibrations, maintaining precision and efficiency in vacuum environments.
Implementation Method 1
a bellows portion including a side wall that includes a bellows structure
Data Source
AI summary
A chamber docking apparatus connecting a first chamber to a second chamber includes: a first fixed body having a passage penetrating from a first end to the second end thereof through which a substrate passes, and communicating with the first chamber; a second fixed body having a passage penetrating from a first end and to a second end thereof through which the substrate passes, and communicating with the second chamber; a length-adjusted body having a passage through which the substrate passes, and configured to adjust in length; and a length-adjusting driver for adjusting the length of the length-adjusted body, and wherein a first end of the length-adjusted body is connected to the second end of the first fixed body, and a second end of the length-adjusted body is detachably connected to the second end of the second fixed body, and wherein the length-adjusted body includes: a bellows portion.