Bellows Lifter Assembly for Compact Optical Inspection Chuck Motion
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Solution Overview
Problem
Existing lifter assemblies in optical inspection systems face challenges such as space constraints, non-perpendicularity under uneven loads, and fixed stroke length, which affect the inspection process of substrates.
Innovation Solution
A lifter assembly with a detachable top plate, a moveable plate, and a bellows structure that is fluidly coupled to a pneumatic system, allowing adjustable vertical movement of the chuck and substrate, and includes a bellows structure for frictionless actuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a pneumatic rod is used for vertical movement, then the lifter assembly can achieve upward and downward motion, but the space required increases when extended
Solution Approach 1:
The bellows structure is nested within the existing lifter assembly housing, allowing the pneumatic actuator to be contained within the same spatial envelope. The bellows folds compressively within the housing volume, enabling vertical movement without requiring additional external space for the actuator mechanism.
Solution Approach 2:
The bellows structure uses a flexible, accordion-like expansion and contraction mechanism that can be compressed within limited space. The flexible bellows material allows the pneumatic rod to extend and retract while maintaining a compact form factor, solving the space occupation problem.
2Ease of operation
If a pneumatic rod is used for lifting, then vertical movement is achieved, but perpendicularity is not maintained under uneven loads
Solution Approach 1:
The bellows structure acts as a flexible mechanical element that can accommodate lateral forces and uneven loads without compromising the perpendicularity of the lifting motion. The flexible nature of the bellows allows it to absorb misalignment and lateral forces, maintaining reliable perpendicular movement even under variable loading conditions.
3Device complexity
If a pneumatic rod with fixed stroke length is used, then the structure is simple, but the stroke length cannot be adjusted
Solution Approach 1:
The bellows structure provides a dynamic, adjustable stroke length capability while maintaining relatively simple overall structure. The length of the bellows expansion can be varied by adjusting the pneumatic pressure and the physical dimensions of the bellows itself, allowing the stroke length to be adapted to different applications without requiring complex mechanical adjustment mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The assembly is more compact, fits in smaller spaces, reduces wear, and maintains perpendicularity under varying loads, enhancing the inspection process efficiency.
Implementation Method 1
a bellows structure operatively coupled to the moveable plate. The lifter assembly yet further includes a pneumatic system fluidly coupled to the bellows structure to selectively expand and contract
Implementation Method 2
a pneumatic system fluidly coupled to the bellows structure to selectively expand and contract
Implementation Method 3
a vacuum chuck configured to support the substrate and hold the substrate with vacuum air pressure
Data Source
AI summary
A lifter assembly for an optical system includes a chuck having a chuck base and a detachable top plate, wherein the detachable top plate is one of a plurality of interchangeable detachable top plates configured to support a substrate. The lifter assembly also includes a moveable plate supporting the chuck on an upper surface of the moveable plate, the moveable plate vertically adjustable between a lower, retracted position and an upper, extended position. The lifter assembly further includes a bellows structure operatively coupled to the moveable plate. The lifter assembly yet further includes a pneumatic system fluidly coupled to the bellows structure to selectively expand and contract, wherein expansion of the bellows structure vertically adjusts the moveable plate to the upper, extended position and contraction of the bellows structure vertically adjusts the moveable plate to the lower, retracted position.