Bellows Liquid Supply Structure for Clean Treatment Liquid Switching
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Solution Overview
Problem
Existing liquid supply systems in semiconductor manufacturing face issues with motor-driven pumps leading to continuous liquid ejection, complexity in treatment liquid circulation, and potential mixing of different liquids due to residual treatment liquid in the pump, particularly when replacing liquids with varying properties or viscosities.
Innovation Solution
A liquid supply apparatus utilizing bellows-driven operation without a motor, where an operating fluid adjusts the volume of a storage space within the bellows to control treatment liquid flow, and a drain line removes residual liquid, simplifying the system and preventing liquid mixing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a motor-driven pump is used to supply treatment liquid, then the liquid can be supplied continuously, but the system complexity increases due to the need for circulation structures and additional components
Solution Approach 1:
The invention extracts and eliminates the motor from the liquid supply system, replacing it with a bellows-based mechanical expansion and contraction mechanism. This removes the need for complex circulation structures and additional components while maintaining the ability to supply treatment liquid as needed.
Solution Approach 2:
The invention uses pneumatic principles by employing a bellows that expands and contracts to move treatment liquid. The bellows mechanism uses air pressure differential to push liquid from the storage tank through the nozzle, eliminating the need for motor-driven pumps and complex circulation systems.
2Productivity
If a motor-driven pump is used, then liquid can be supplied, but residual liquid remains in the pump causing mixing when replacing treatment liquids
Solution Approach 1:
The invention extracts the residual liquid from the system by incorporating a drain line that extends to the bottom of the storage tank. This allows complete drainage of residual treatment liquid before replacement, preventing mixing between different liquid types or viscosities.
Solution Approach 2:
The invention performs preliminary drainage of the storage tank before liquid replacement. The drain line enables complete removal of residual liquid in advance, ensuring that when new treatment liquid is supplied, there is no mixing with previous liquid, thereby maintaining liquid purity and consistency.
3Duration of action of moving object
If the pump operates continuously to avoid frequent stopping, then liquid can be supplied intermittently, but liquid is continuously ejected onto the substrate causing waste
Solution Approach 1:
The invention implements periodic action through the bellows mechanism that expands and contracts on demand. Treatment liquid is supplied intermittently only when needed, with the bellows expanding to push liquid and then contracting, allowing complete drainage between cycles. This eliminates continuous liquid ejection and the associated waste.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for efficient, non-continuous treatment liquid supply, reduces system complexity, and minimizes liquid waste and mixing during liquid replacement, ensuring purity and efficiency in semiconductor processing.
Implementation Method 1
bellows having the operating space formed on its outside within the base unit, including an inlet and an outlet, which form ends of the inlet and outlet ports, respectively, of the base unit and communicate to create a storage space that the treatment liquid flows in and out of, and expanding or contracting to increase or reduce the volume of the storage space
Implementation Method 2
an operating unit supplying operating fluid into or discharging the operating fluid from the operating space; and a drain line communicating with the storage space, from below the base unit, and discharging the treatment liquid
Data Source
AI summary
A liquid supply apparatus is provided. The liquid supply apparatus includes: a base unit having an operating space, an inlet port, through which a treatment liquid is introduced, and an outlet port, through which the treatment liquid is discharged, formed therein; bellows having the operating space formed on its outside within the base unit, including an inlet and an outlet, which form ends of the inlet and outlet ports, respectively, of the base unit and communicate to create a storage space that the treatment liquid flows in and out of, and expanding or contracting to increase or reduce the volume of the storage space; an operating unit supplying operating fluid into or discharging the operating fluid from the operating space; and a drain line communicating with the storage space, from below the base unit, and discharging the treatment liquid, wherein the operating unit supplies the operating fluid into the operating space to enable the bellows to contract, or discharges the operating fluid from the operating space to enable the bellows to expand, and the drain line discharges residual treatment liquid remaining in the storage space to replace the treatment liquid.