Bellows Pump Device Pressure Control
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Solution Overview
Problem
The existing bellows pump devices generate impact pressure and cavitation in the suction pipe due to constant air pressure settings, which can adversely affect semiconductor manufacturing processes, as the required air pressure fluctuates with fluid flow rates.
Innovation Solution
A bellows pump device with a solenoid valve, fluid pressure adjustment unit, detection unit, and control unit that performs initial control to determine the optimal fluid pressure by gradually increasing air pressure before operation, ensuring the bellows expand to the appropriate position, thus preventing impact pressure and cavitation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If constant pressure value is used for pressurized air supply, then device complexity is reduced, but impact pressure and cavitation occur in the suction pipe
Solution Approach 1:
The system performs preliminary action by gradually increasing the air pressure before the bellows starts suction operation. The control unit controls the air pressure adjustment unit to incrementally increase pressure in advance, allowing the system to determine the appropriate operation pressure before actual fluid suction begins, thereby preventing water hammer and cavitation effects.
Solution Approach 2:
The invention transforms the static constant pressure system into a dynamic adaptive pressure system. The control unit adjusts the air pressure based on detection signals from the detection unit, which monitors bellows expansion position. This dynamic adjustment allows the system to adapt pressure to actual operating conditions, preventing harmful pressure shocks while maintaining effective pumping.
2Object-affected harmful factors
If air pressure is gradually increased in advance, then appropriate operation fluid pressure is determined to prevent impact pressure, but the operation time increases due to initial control process
Solution Approach 1:
The system performs preliminary pressure adjustment and determination of operation pressure before actual pumping operation. By gradually increasing pressure in advance and detecting the bellows expansion position, the system establishes optimal operating parameters beforehand, preventing harmful pressure shocks during subsequent operation while accepting a controlled initial time investment.
3Ease of operation
If constant pressure is used, then ease of operation is improved, but the bellows may not expand to the appropriate position affecting fluid handling stability
Solution Approach 1:
The system implements feedback control where the detection unit monitors the bellows expansion position and sends detection signals to the control unit. Based on this feedback, the control unit adjusts the air pressure through the air pressure adjustment unit to ensure the bellows expand to the appropriate position, maintaining reliable fluid handling stability while automating the pressure control process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively inhibits the generation of impact pressure and cavitation during the start of operation, ensuring stable fluid handling and preventing damage to semiconductor manufacturing processes.
Implementation Method 1
a fluid chamber to and from which a pressurized fluid is supplied and discharged and an expandable/contractible bellows, the bellows expanding to a predetermined expansion position and a transport fluid being sucked into the bellows when the pressurized fluid is supplied to the fluid chamber, the bellows contracting and the transport fluid within the bellows being discharged when the pressurized fluid is discharged from the fluid chamber
Implementation Method 2
a solenoid valve configured to switch supply/discharge of the pressurized fluid to/from the fluid chamber
Implementation Method 3
the control unit outputs a control command to the fluid pressure adjustment unit so as to gradually increase the fluid pressure of the pressurized fluid to be supplied to the fluid chamber in advance
Implementation Method 4
a detection unit configured to detect that the bellows is at the expansion position, and output a detection signal
Data Source
AI summary
A bellows pump device includes a control unit which, before operation of the bellows pump device is started, performs initial control in which solenoid valves are switched and pressurized air is supplied to suction-side air chambers in advance, thereby determining operation air pressures which are air pressures of the pressurized air to be supplied to the suction-side air chambers during the operation. As the initial control, the control unit outputs control commands to electropneumatic regulators so as to gradually increase the air pressures of the pressurized air to be supplied to the suction-side air chambers in advance, and when detection signals resulting from detection of expansion positions of the bellows are inputted from the proximity sensors to the control unit, the control unit determines the air pressures of the pressurized air supplied to the suction-side air chambers at that time as the operation air pressures.