Bellows Seal Ring Assembly for Isolated Processing Chamber Volumes
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Solution Overview
Problem
Conventional cluster tools for substrate processing face limitations such as mechanical throughput constraints, high levels of particulates, and restricted process condition flexibility between processing chambers.
Innovation Solution
The implementation of a bellows assembly that isolates a chamber volume within a substrate processing chamber, allowing for adjustable pressures and minimized processing volumes, thereby enhancing process condition flexibility and reducing gas usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional cluster tools are used for substrate processing, then multiple processing chambers can be configured, but mechanical throughput is limited and process condition flexibility is restricted
Solution Approach 1:
The processing chamber is divided into multiple isolated processing volumes (first processing volume, second processing volume, etc.) that can be independently sealed and pressurized. Each volume can operate under different process conditions simultaneously, enabling multiple substrates to be processed in parallel with different parameters, thus improving both throughput and process flexibility.
Solution Approach 2:
The system employs dynamically controllable seals (bellows assemblies, lift assemblies) that can selectively isolate or connect processing volumes based on process requirements. This dynamic sealing capability allows the system to flexibly reconfigure process conditions for different substrates while maintaining high throughput through parallel processing.
2Adaptability or versatility
If processing chambers are isolated to enable different process conditions, then process condition flexibility improves, but mechanical throughput may be reduced
Solution Approach 1:
Multiple processing volumes are combined within a single processing chamber structure, sharing common infrastructure (chamber walls, control systems, robotic transfer mechanisms) while maintaining independent process environments. This merging approach enables parallel processing of multiple substrates under different conditions simultaneously, achieving both high flexibility and high throughput.
Solution Approach 2:
The processing chamber structure serves multiple functions: it provides the physical container for multiple processing volumes, acts as the vacuum barrier, houses the robotic transfer system, and supports the sealing mechanisms. This multi-functionality reduces system complexity and enables efficient parallel processing, maintaining high throughput while achieving process flexibility.
3Loss of substance
If processing volumes are minimized to reduce gas usage, then gas consumption decreases, but sealing complexity increases
Solution Approach 1:
The patent employs flexible bellows assemblies as sealing elements to create isolated processing volumes. The bellows provide compliant sealing that can accommodate thermal expansion and mechanical movement while maintaining vacuum isolation. This flexible sealing approach enables minimized processing volumes with reduced gas consumption while managing sealing complexity through elastic deformation capabilities.
Solution Approach 2:
The bellows assembly acts as an intermediary element between the rigid chamber structure and the moving components (lift assemblies, chucks). It provides the necessary sealing function while accommodating relative motion and dimensional changes, thereby enabling compact processing volumes with minimized gas usage without requiring overly complex rigid sealing mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution improves mechanical throughput, reduces particulate contamination, and decreases downtime by allowing for independent process conditions in each processing chamber, while minimizing gas consumption and leakage.
Implementation Method 1
the seal ring assembly, the outer ring seal, and the lower sealing surface form a vacuum seal with one another to isolate the chamber volume from the transfer volume
Implementation Method 2
the assembly bellows is compressed to provide sealing force between the support chuck and the processing chamber
Data Source
AI summary
A method and apparatus for substrate processing and a cluster tool including a transfer chamber assembly and a plurality of processing assemblies. Processing chamber volumes are sealed from the transfer chamber volume using a support chuck on which a substrate is disposed. A seal ring assembly is coupled to the support chuck. The seal ring assembly includes an inner assembly, an assembly bellows circumscribing the inner assembly, and a bellows disposed between the inner and outer platform. An inner ring is disposed between inner assembly of the seal ring assembly and the bottom surface of the support chuck. An outer ring disposed between the seal ring assembly and the lower sealing surface of the process chamber wall. The support chuck is raised to form an isolation seal between the processing chamber volume and the transfer chamber volume using the bellows, the inner ring, and the outer ring.