Bellows Suction Vacuum Table for Flattening Warped Panels

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Solution Overview

Problem

Existing vacuum tables fail to adequately flatten the edges of warped substrates, risking damage to the active area and increasing complexity and maintenance demands due to the need for clamping devices that occupy valuable space.

Innovation Solution

A vacuum table with a vacuum plate featuring bellows-shaped suction cups and a gasket that protrude from the surface, allowing for negative pressure application to compress and flatten substrates, including those with up to 6 mm deflection, without direct contact that could damage the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If clamping devices are used to push down on the edges of the panel, then the flattening effect is improved, but the risk of damaging the active area increases and the device complexity increases

Engineering Contradiction:

Improveflattening effectVSAvoiddamage risk to active area

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the mechanical clamping system with a vacuum-based system. Instead of using physical clamps that contact and press on the panel edges, the invention uses a vacuum table with suction cups that create negative pressure to hold and flatten the panel. This substitution eliminates direct mechanical contact stresses that could damage the active area while maintaining the flattening effect.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs pneumatic principles by using a vacuum table with suction cups connected to a vacuum source. The vacuum system creates negative pressure to compress the flexible suction cups against the panel edges, providing the necessary holding and flattening force without mechanical contact. This pneumatic approach resolves the contradiction by eliminating harmful mechanical stresses.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Manufacturing precision

If clamping devices are used to push down on the edges of the panel, then the flattening effect is improved, but the device complexity and maintenance demand increase

Engineering Contradiction:

Improveflattening effectVSAvoidvacuum table complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent merges the flattening function and the holding function into a single integrated vacuum table system. The suction cups serve dual purposes: they hold the panel in place and simultaneously apply the flattening force through vacuum compression. This consolidation eliminates the need for separate clamping mechanisms, reducing overall device complexity while maintaining the flattening effect.

Inventive Principle:

Principle #5Merging (Combining)

3Manufacturing precision

If clamps are used to flatten the panel edges, then the flattening effect is improved, but valuable space is occupied and the clean environment for optical components is compromised

Engineering Contradiction:

Improveedge flatteningVSAvoidavailable space for optical components

Core Design Contradiction:

Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The patent replaces protruding mechanical clamps with a vacuum table system where the suction cups are integrated into the table surface. When vacuum is applied, the suction cups compress flat against the panel edges, eliminating the need for protruding clamps that would occupy space. This substitution preserves the clean environment and maximizes available space for optical components while maintaining effective edge flattening.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively flattens heavily warped substrates with reduced risk of damage and increased efficiency by using suction cups and a gasket to apply even pressure across the substrate, minimizing the need for additional clamping devices and maintaining a clean environment for optical components.

Implementation Method 1

at least one vacuum source in fluid communication with the openings of the vacuum plate and the plurality of suction cups

Methodology Applied

Scientific EffectVacuum: Vacuum

Implementation Method 2

The at least one vacuum source may be configured to apply negative pressure to compress the plurality of suction cups into the compressed state

Methodology Applied

Scientific EffectNegative pressure: Pressure Gradient

Data Source

PatentUS20240246199A1Vacuum table for warped panels

Publication Date: 2024.07.25 ORBOTECH LTD

AI summary

The vacuum table includes a vacuum plate having openings on a top surface, a plurality of suction cups disposed on the top surface of the vacuum plate and having a bellows shape, and at least one vacuum source in fluid communication with the openings of the vacuum plate and the plurality of suction cups. The plurality of suction cups protrude from the top surface of the vacuum plate in an uncompressed state and are substantially coplanar with the top surface of the vacuum plate in a compressed state. The at least one vacuum source is configured to apply negative pressure to compress the plurality of suction cups into the compressed state.