Bending Beam Closed-Loop Control With High-Bit-Depth Logic

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Solution Overview

Problem

Scanning probe microscopes face challenges in achieving precise control of bending beams in closed control loops due to limitations in digital signal processing, particularly when switching between operating modes, which can lead to damage to samples or probes, and the complexity of combining FPGA and DSP systems for signal demodulation and control.

Innovation Solution

A device and method utilizing a programmable logic circuit with a bit depth greater than the controlled variable to process control errors, allowing precise control of bending beams without overflow, and enabling mode transitions without loss of control, using a programmable logic circuit with interfaces for ADC and DAC to manage bit depth and reduce data overflow.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a programmable logic circuit processes control errors with bit depth greater than the controlled variable bit depth, then control precision is improved and overflow is prevented, but device complexity increases

Engineering Contradiction:
Improvecontrol precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent changes the parameter of bit depth in the programmable logic circuit to be greater than the bit depth of the controlled variable. This parameter change allows the circuit to process control errors with higher precision and prevent overflow, directly resolving the contradiction between control precision and device complexity by accepting increased complexity as necessary for accurate control.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The programmable logic circuit acts as an intermediary between the controlled variable input and the control output. By using this intermediary component with enhanced bit depth capability, the system achieves precise control without requiring the entire system to be overly complex, as the intermediary handles the precision requirements locally.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If scanning probe microscopes switch between operating modes, then operational versatility is improved, but control stability deteriorates due to potential loss of control and damage risk

Engineering Contradiction:
Improveoperational versatilityVSAvoidcontrol stability
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The patent implements preliminary action by using the programmable logic circuit to process control errors before mode switching occurs. The circuit continuously monitors and adjusts control parameters in advance, ensuring that control stability is maintained even during mode transitions. This prevents loss of control and potential damage while allowing the system to switch between operating modes.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If contact mode is used for scanning, then measurement precision is improved, but harmful effects increase due to probe wear and sample damage

Engineering Contradiction:
Improvespatial resolutionVSAvoidprobe wear and sample damage
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies dynamics by enabling the system to switch between different operating modes (contact mode, non-contact mode, intermittent mode) based on the specific measurement requirements. The programmable logic circuit dynamically adjusts the operating mode to balance measurement precision with minimizing harmful effects, allowing contact mode when high precision is needed and non-contact mode to prevent probe wear and sample damage.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS20250362321A1Device and method for operating a bending beam in a closed control loop
Publication Date: 2025.11.27 CARL ZEISS SMT GMBH
  • US20250362321A1 patent drawing
  • US20250362321A1 patent drawing
  • US20250362321A1 patent drawing

AI summary

The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.