Bent Diptube Design for Host Ampoule Weld Shrinkage
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Solution Overview
Problem
Existing chemical containers in the electronic device fabrication industry face challenges in maintaining chemical purity, monitoring chemical quantity, and efficient utilization due to limitations in diptube design, which affects the refill, waste recovery, and cleaning processes, leading to potential wafer defects and increased costs.
Innovation Solution
A diptube design with a bend that creates a mechanical spring effect, allowing it to maintain contact with the container's interior bottom surface despite weld shrinkage, and an off-center placement that allows for a level sensor probe to measure chemical levels accurately, enabling efficient refill, waste recovery, and cleaning processes using a single line.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a straight diptube is used in a chemical container, then the structure is simple and easy to manufacture, but the diptube cannot maintain contact with the interior bottom surface when weld shrinkage occurs, leading to poor cleaning efficiency and inaccurate level measurement
Solution Approach 1:
The diptube is designed with a bend instead of being straight, creating a curved structure that allows the bottom end to maintain perimetral contact with the interior bottom surface of the container. This curved configuration compensates for weld shrinkage and ensures reliable contact throughout the container's service life.
Solution Approach 2:
The diptube features an asymmetric design where the top end is offset from the centerline of the container, allowing the bottom end to reach the interior bottom surface. This asymmetric positioning enables both reliable bottom contact and clearance for the level sensor probe.
2Measurement precision
If the diptube is positioned centrally in the container, then the structure is symmetric and simple, but it blocks the level sensor probe from measuring chemical levels accurately
Solution Approach 1:
The diptube is positioned asymmetrically with its top end offset from the container's centerline. This asymmetric placement creates clearance between the diptube and the centerline position, allowing the level sensor probe to be installed and function without obstruction while the diptube bottom still contacts the interior bottom surface.
3Loss of substance
If the container is emptied completely to maximize chemical utilization, then chemical waste is reduced, but the fabrication process operates in run-dry condition causing wafer defects
Solution Approach 1:
The level sensor probe provides real-time feedback on the chemical level in the container. This feedback enables the system to monitor and maintain appropriate chemical levels, preventing both complete emptying (which causes wafer defects) and excessive retention (which wastes expensive chemicals).
4Reliability
If cleaning is performed frequently to maintain chemical purity, then contamination is reduced, but cleaning time and solvent consumption increase
Solution Approach 1:
The diptube design with bottom contact enables complete extraction of chemicals from the container during draining operations. This thorough extraction capability allows for more effective cleaning cycles that remove all residual chemicals and contaminants, improving purity while potentially reducing the frequency of cleaning required.
Solution Approach 2:
The perimetral contact design allows the diptube to reach all areas of the container bottom, enabling self-cleaning capabilities during normal operation where the flowing chemical helps flush contaminants toward the diptube outlet, reducing the need for intensive manual cleaning cycles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The diptube design reduces cleaning time and solvent/purge gas usage, ensures accurate chemical level measurement, and prevents wafer defects by maintaining perimetral contact and allowing for precise chemical management.
Implementation Method 1
A diptube design with a bend that creates a mechanical spring effect, allowing it to maintain contact with the container's interior bottom surface despite weld shrinkage
Data Source
AI summary
In one respect, the invention is an improved diptube design for a container for containing and dispensing a liquid chemical, the diptube generating a spring force when compressed that acts to maintain a bottom end of the diptube in contact with a bottom interior surface of the container and a notch located at a bottom edge of the bottom end of the diptube that creates a flow communication between the diptube and the interior volume of the base portion of the container. In another respect, the invention is a method of constructing a container having these limitations.