Beryllium Mirror Stiffness via Chemical Etching

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Solution Overview

Problem

Limited rotation motor systems face challenges in achieving high stiffness and low inertia in scanning mirror components, leading to limitations in bandwidth and positional precision due to the constraints of material properties and machining limitations, particularly with beryllium, which is expensive and prone to cracking.

Innovation Solution

A method of fabricating beryllium mirror structures using chemical etching to reduce thickness and taper wall sections, allowing for increased stiffness while minimizing inertia, by immersing the substrate in a fluid etchant solution to achieve thinner, triangular cross-sectional shapes without compromising structural support.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If extra material is added to the mirror to increase stiffness, then stiffness is improved, but inertia increases requiring a larger, more expensive motor

Engineering Contradiction:
Improvemirror stiffnessVSAvoidmirror inertia
Core Design Contradiction:
StrengthVSWeight of moving object

Solution Approach 1:

The patent applies local quality by creating a non-uniform thickness distribution in the mirror substrate. The chemical etching process selectively removes material from specific regions (particularly the rear surface and edges) while preserving thickness in critical areas. This results in a mirror with varying local stiffness properties - thicker regions provide structural support and stiffness, while thinner regions reduce overall inertia, thereby resolving the contradiction between stiffness and inertia.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs parameter changes by transforming the mirror substrate through chemical etching, which alters the physical parameters of the material distribution. The etching process changes the thickness parameter spatially, creating a optimized mass distribution that achieves high stiffness-to-inertia ratio. This parameter transformation allows the mirror to meet both stiffness requirements and inertia constraints without requiring additional material.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If traditional machining methods are used on beryllium, then material removal is achieved, but the process is expensive and the material is prone to cracking

Engineering Contradiction:
Improvemanufacturing cost and complexityVSAvoidberyllium cracking susceptibility
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent replaces mechanical machining processes with chemical etching. Instead of using mechanical tools that generate stress, heat, and vibration (which can cause beryllium cracking), the invention uses chemical reactions to remove material. This substitution eliminates the mechanical stresses that lead to cracking while providing precise control over material removal, thereby improving reliability and reducing manufacturing complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the manufacturing parameter from mechanical force to chemical concentration. The etching process uses controlled chemical solutions with specific concentrations and compositions to selectively remove material. This parameter change from mechanical to chemical domain allows for precise, stress-free material removal that avoids beryllium cracking and reduces manufacturing costs compared to traditional precision machining.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The approach results in mirrors with exceptionally low specific inertia and high stiffness, enabling improved bandwidth without the need for larger, more expensive motors or control systems, while being economically more viable than traditional machining methods.

Implementation Method 1

exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure

Methodology Applied
Scientific EffectChemical etching: Ablation

Data Source

PatentUS10761293B2Systems and methods for providing mirrors with high stiffness and low inertia involving chemical etching
Publication Date: 2020.09.01 NOVANTA CORP
  • US10761293B2 patent drawing
  • US10761293B2 patent drawing
  • US10761293B2 patent drawing

AI summary

A method is disclosed of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure.