Beryllium Sample Tip Structure for Cleaner EDS Detection

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Solution Overview

Problem

Energy Dispersive X-Ray Spectroscopy (EDS) in charged particle microscopes is hindered by spurious peaks from sample holder materials, necessitating improved designs for higher solid angle and collimation towards the EDX detector to enhance analysis accuracy.

Innovation Solution

A sample tip comprising a beryllium cradle with a recess and an aluminium bumper, designed to minimize interference by providing a high solid angle and additional collimation, with a movable clamping member for secure sample holding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a conventional sample holder is used, then the structure is simple and easy to manufacture, but spurious peaks are generated from holder materials that interfere with EDS analysis

Engineering Contradiction:
ImproveEDS analysis accuracyVSAvoidspurious peaks from holder materials
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The invention extracts and removes the problematic holder materials from the EDS detection path. The sample tip design eliminates traditional holder structures that generate spurious peaks, allowing only necessary minimal structures to remain, thus preventing interference with EDS analysis

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces an intermediary structure (the specialized sample tip with recess and bumper) that mediates between the sample and the EDS detector. This intermediary structure is designed to minimize interference while maintaining sample holding functionality, acting as a bridge that prevents harmful interactions

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the solid angle towards the EDX detector is increased, then the detection efficiency is improved, but the device complexity increases

Engineering Contradiction:
Improvedetection efficiencyVSAvoidsample tip structure complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The invention utilizes spatial dimensionality optimization by designing the sample tip geometry (recess depth, bumper positioning) to maximize the solid angle in three-dimensional space. This allows improved detection efficiency without proportionally increasing structural complexity through clever geometric arrangement

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If additional collimation is provided for the EDX detector, then the spectral resolution is improved, but the device complexity increases

Engineering Contradiction:
Improvespectral resolutionVSAvoidcollimation structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The sample tip structure serves multiple functions simultaneously: it holds the sample, provides collimation for the EDS detector, and maintains mechanical stability. The recess and bumper components perform both structural support and spectral optimization functions, reducing overall device complexity while achieving improved spectral resolution

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentEP4607570A1Sample tip
Publication Date: 2025.08.27 FEI CO
  • EP4607570A1 patent drawingFigure 1
  • EP4607570A1 patent drawingFigure 2a~2b
  • EP4607570A1 patent drawingFigure 3a~3b

AI summary

The invention relates to a sample holder tip (hereinafter referred to as the sample tip) for releasably holding a sample, wherein the sample tip comprises: a cradle comprising beryllium, with a recess for releasably receiving a sample, and a bumper comprising aluminium. In particular, the invention relates to a sample tip that may be used in a charged particle microscope.