Beryllium Sample Tip Layout for Cleaner EDS Detection
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Solution Overview
Problem
Existing charged particle microscopy systems face issues with spurious peaks in Energy Dispersive X-Ray Spectroscopy (EDS) due to materials present in the sample holder, which interfere with accurate elemental analysis.
Innovation Solution
A sample tip comprising a cradle made of beryllium and a bumper made of aluminium, designed to minimize interference by providing a high solid angle towards the EDX detector and additional collimation, while ensuring a robust and compact construction for reliable sample holding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional sample holder is used, then the structure is simple and easy to manufacture, but spurious peaks are introduced from the holder materials that interfere with EDS analysis
Solution Approach 1:
The patent removes the sample holder from the direct detection path between the sample and EDX detector. By extracting the holder out of the detection path, its material no longer intercepts x-rays from the sample, eliminating the source of spurious peaks while still providing mechanical support for the sample grid
Solution Approach 2:
The patent introduces a thin window membrane as an intermediary between the sample and detector. This membrane allows x-rays to pass through while separating the sample holder from the detection path, enabling the holder to remain in place for mechanical support without interfering with x-ray detection
2Productivity
If the detector is positioned close to the sample for high solid angle detection, then detection efficiency improves, but the holder structure interferes with the detection path
Solution Approach 1:
The detection system is segmented into multiple components: the sample holder plane, the detector plane, and the intermediate window membrane. This segmentation allows the detector to be positioned close to the sample for high solid angle while the holder and detector are separated by the window, preventing direct interference in the detection path
Solution Approach 2:
The patent transitions from a conventional planar detection geometry to a three-dimensional arrangement where the window membrane creates an intermediate detection plane. This dimensional change allows simultaneous optimization of detector proximity for high solid angle and holder separation to eliminate interference
3Measurement precision
If additional collimation components are added to improve detection geometry, then detection precision improves, but device complexity increases
Solution Approach 1:
The window membrane serves multiple functions simultaneously: it acts as a collimation element to define the detection geometry, serves as a physical separator between holder and detector, and maintains structural integrity of the detection assembly. This multi-functionality achieves detection precision improvement without proportional increase in device complexity
Data Source
AI summary
A sample holder tip (hereinafter referred to as a sample tip) releasably holds a sample, wherein the sample tip comprises: a cradle comprising beryllium, with a recess for releasably receiving the sample, and a bumper comprising aluminium. In particular, the disclosure relates to a sample tip that may be used in a charged particle microscope.