Bessel Beam Phase Modulation for High-Speed Glass Drilling
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Solution Overview
Problem
Conventional through glass via technology is limited by slow drilling speeds due to the direct writing pattern of laser beams, which restricts the production capacity for drilling holes on glass substrates, especially for high-density hole patterns required in modern 3C devices and high-frequency communication applications.
Innovation Solution
A Bessel beam generating apparatus and method that utilizes a phase modulation module to convert a circular beam into an asymmetric phase, followed by a scanning module that scans the beam at different angles, enhancing the efficiency of hole drilling through glass substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If direct writing pattern is used for laser beam drilling, then positioning accuracy is improved, but drilling speed deteriorates
Solution Approach 1:
The patent segments the drilling process into two independent functions: beam generation (creating Bessel beams with phase modulation) and beam scanning (positioning multiple beams simultaneously). This segmentation allows the system to maintain positioning accuracy through precise scanning control while achieving high drilling speed through parallel multi-point processing and rapid beam steering, thereby resolving the contradiction between positioning accuracy and drilling speed.
Solution Approach 2:
The patent introduces angular dimension to the drilling process by scanning the laser beam at different angles to create asymmetric phase distribution. This angular scanning enables the Bessel beam to maintain its self-healing and non-diffraction properties while achieving high-speed drilling through rapid angular modulation, thus resolving the contradiction between positioning accuracy and drilling speed by adding a new operational dimension.
2Manufacturing precision
If direct writing pattern is used for laser beam drilling, then manufacturing precision is improved, but productivity deteriorates
Solution Approach 1:
The patent implements continuous useful action by using Bessel beams that maintain their focusing capability throughout the scanning process. The phase modulation module continuously generates asymmetric phase distributions, and the scanning module continuously steers the beams to different positions and angles, enabling uninterrupted high-speed drilling with consistent precision, thereby resolving the contradiction between manufacturing precision and productivity.
Solution Approach 2:
The patent segments the drilling function into parallel beam generation and independent scanning control, allowing multiple holes to be drilled simultaneously at different positions and angles. This segmentation enables the system to maintain high manufacturing precision through controlled beam positioning while dramatically increasing productivity through parallel processing, thus resolving the contradiction between manufacturing precision and production capacity.
3Speed
If phase modulation is applied to create asymmetric circular beam, then beam scanning efficiency is improved, but device complexity increases
Solution Approach 1:
The patent replaces mechanical beam positioning with optical phase modulation. Instead of physically moving the entire laser system, the phase modulation module uses optical elements to create asymmetric phase distributions that enable rapid beam steering. This substitution dramatically improves beam scanning efficiency while keeping the mechanical structure relatively simple, thus resolving the contradiction between scanning efficiency and device complexity.
Solution Approach 2:
The patent changes the phase parameter of the circular beam to create asymmetric distribution. By modulating the phase parameter rather than changing the physical position of the beam source, the system achieves efficient beam scanning with reduced mechanical complexity. This parameter-based control resolves the contradiction between beam scanning efficiency and apparatus complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly increases the drilling speed by allowing simultaneous scanning and focusing of the Bessel beam, reducing the time required to drill holes on glass substrates, with the apparatus capable of drilling 10,000 holes per second compared to 5,000 holes per second in conventional methods, thus enhancing production capacity.
Implementation Method 1
a phase modulation module, configured for rectifying the incident beam into a circular beam and further modulating a phase of the circular beam into an asymmetric phase so as to form an asymmetric collimated circular beam
Implementation Method 2
a focusing element, configured for focusing and interfering the asymmetric collimated circular beam into a Bessel beam for machining
Data Source
AI summary
A method for generating Bessel beams includes the steps of: utilizing a light source to generate an incident beam to a phase modulation module; utilizing the phase modulation module to rectify the incident beam into a circular beam, and to modulate a phase of the circular beam into an asymmetric phase so as to form an asymmetric collimated circular beam provided to a scanning module; utilizing the scanning module to compensate the asymmetric collimated circular beam, and utilizing the asymmetric collimated circular beam to scan at different angles and then enter a focusing element; and, utilizing the focusing element to focus and interfere the asymmetric collimated circular beam into form a Bessel beam for machining.