Bevel-Etched Substrate Center Detection Using Multi-Point Circle Fitting
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing method for determining the center coordinate of a bevel-etched substrate is inaccurate and time-consuming, especially when one of the eight points selected is significantly out of range, requiring individual input of values.
Innovation Solution
A substrate processing apparatus and method that sets at least three coordinates in the bevel-etched region to calculate the center coordinates of a circle passing through these points, using multiple groups of coordinates at predetermined angles to improve accuracy and reduce calculation time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If 8 points are selected to calculate the center coordinate of the bevel-etched region, then the center coordinate can be obtained, but the accuracy is degraded when any point is significantly out of range and it is time-consuming to find and input the values individually
Solution Approach 1:
The system automatically detects and calculates center coordinates using vision recognition technology. The inspection unit autonomously identifies the bevel-etched region, determines the inner line and outer circumferential line, and computes the center coordinate without requiring manual point selection or input, thereby eliminating time loss while maintaining accuracy
Solution Approach 2:
The manual mechanical process of selecting and inputting 8 points is replaced by an automated vision-based detection system. The inspection unit uses image processing to automatically identify the bevel-etched region boundaries and calculate the center coordinate, substituting human operation with automated optical-mechanical systems
2Measurement precision
If 8 points are selected manually to calculate the center coordinate, then the center coordinate value can be obtained, but the process is time-consuming
Solution Approach 1:
The inspection unit autonomously performs the entire center coordinate calculation process without human intervention. It automatically detects the bevel-etched region, identifies the inner line, determines inspection coordinates, and calculates the center coordinate, thereby significantly improving productivity while maintaining measurement precision
Solution Approach 2:
The system implements continuous automated inspection where the vision system continuously captures images and the inspection unit continuously processes data to determine center coordinates. This eliminates the discontinuous manual operation of selecting and inputting points, thereby improving inspection efficiency
3Measurement precision
If the vision system calculates the center coordinate using 8 points with individual input, then the center coordinate can be determined, but the accuracy is degraded when points are out of range
Solution Approach 1:
The inspection unit automatically detects the bevel-etched region boundaries and determines the inner line to establish inspection coordinates. This self-service approach eliminates manual point selection errors and ensures that coordinates are always within the valid range, thereby improving both accuracy and reliability
Solution Approach 2:
The system uses the detected inner line and outer circumferential line as feedback to automatically determine appropriate inspection coordinates. This feedback mechanism ensures that selected points are always within the bevel-etched region boundaries, preventing out-of-range errors and improving measurement reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the accuracy and speed of obtaining center coordinate values for bevel-etched substrates by averaging center coordinates calculated from multiple groups of inspection points, thereby improving the precision and efficiency of the process.
Implementation Method 1
the vision system sets 8 points in the inner area of the bevel-etched region, calculates the center value of each of the two points facing the center of the substrate
Implementation Method 2
calculating center coordinates of a circle passing through the set at least three inspection coordinates as center coordinates of the bevel-etched region
Data Source
Figure 1
Figure 2
Figure 3
AI summary
Disclosed is a substrate processing apparatus and a substrate processing method that may reduce the time to obtain a center coordinate value when obtaining the center coordinate value of an edge region of a bevel-etched substrate. The substrate processing apparatus for inspecting a substrate in which a bevel-etched region is formed in an edge includes an inspection unit for setting at least three coordinates in an bevel-etched region of the substrate as inspection coordinates, and calculating center coordinates of a circle passing through the set at least three inspection coordinates as center coordinates of the bevel-etched region.