Bezier Electrode Profiles for Bulk Acoustic Resonator Pseudo-Mode Suppression

The patent applies curvature by using Bezier curves to define the electrode profile instead of straight line segments. The electrode boundary is formed by connecting multiple Bezier curves, creating a smooth curved shape that eliminates parallel boundaries while providing superior acoustic wave reflection characteristics. This curved geometry effectively suppresses transverse acoustic waves and pseudo-modes while meeting modern RF performance requirements.

The patent changes the geometric parameters of the electrode by using higher-order Bezier curves (order ≥ 2) with specifically controlled control points. The curve segments are constructed with equal radii of curvature at connection points, and the electrode profile parameters are optimized to achieve both pseudo-mode suppression and compliance with modern RF specifications.

The patent employs asymmetric electrode design by using Bezier curves that eliminate parallel boundaries. The electrode profile is constructed from multiple curve segments with varying curvatures, ensuring no two boundaries are parallel. This asymmetric geometry disrupts the continuous reflection path of transverse acoustic waves, preventing standing wave formation while remaining manufacturable through standard photolithography processes.

By replacing straight line segments with curved Bezier segments, the patent eliminates parallel boundaries that cause harmful acoustic wave reflections. The curved geometry provides gradual transitions that scatter transverse acoustic waves instead of reflecting them continuously, while the electrode can still be manufactured using conventional fabrication methods.