BIB Sample Pre-Alignment Using Matched Mask Geometry
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Solution Overview
Problem
Broad Ion Beam (BIB) polishing systems face inefficiencies in sample preparation due to time-consuming alignment processes and increased redeposition of sample material, limiting their commercial application potential.
Innovation Solution
A method for pre-aligning samples using adjustable sample holders and geometrically similar masks outside and within the BIB system, allowing for efficient processing without the need for realignment during BIB system operation, and utilizing additional BIB sources to maintain system uptime during maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If samples are precisely aligned with masks during BIB system operation, then processing accuracy is improved, but sample preparation time increases and workflow efficiency decreases
Solution Approach 1:
The patent applies preliminary action by pre-aligning samples to the first mask outside the BIB system before processing. This pre-alignment ensures that when the sample holder is nested with the second mask inside the BIB system, the sample is already in the correct position, eliminating the need for time-consuming realignment during system operation.
Solution Approach 2:
The patent uses copying by creating a geometrically similar first mask outside the BIB system that replicates the configuration of the second mask inside the system. This copy allows samples to be pre-aligned using the first mask, and the alignment is transferable to the second mask, maintaining precision without requiring the sample to be physically present during mask configuration.
2Productivity
If higher current broad ion beam is used to rapidly remove sample material, then processing speed is improved, but redeposition of material onto the source increases requiring frequent cleaning and system downtime
Solution Approach 1:
The patent applies segmentation by using multiple BIB sources instead of a single source. When one source requires cleaning due to redeposition, another source can continue processing samples, thereby maintaining system productivity and eliminating downtime associated with source maintenance.
Solution Approach 2:
The patent ensures continuity of useful action by having multiple BIB sources available simultaneously. While one source is being cleaned or maintained, another source continues to process samples, ensuring that the system remains productive without interruption and minimizing overall system downtime.
3Manufacturing precision
If precise alignment skill is required for sample-mask alignment, then alignment accuracy is improved, but operational complexity and skill requirements increase
Solution Approach 1:
The patent applies self-service by designing a system where the sample holder and masks are configured to automatically maintain proper geometric relationships. The adjustable portion of the sample holder and the geometrically similar masks work together to self-align samples without requiring complex manual adjustment or high-level alignment skills during BIB system operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces sample preparation time, increases system throughput, and minimizes downtime by enabling continuous processing with reduced redeposition, thus enhancing the commercial viability of BIB systems.
Implementation Method 1
BIB polishing systems directing a high energy, unfocused or minimally focused beams of ions (e.g., Argon ions) at a sample, where the beam degrades and/or otherwise removes the portions of the sample upon which it is incident
Implementation Method 2
samples being processed need to be precisely aligned with special masks that are designed to block portions of the beam from being incident on regions of the sample that users do not desire to be removed
Data Source
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AI summary
Systems and methods for pre-aligning samples for more efficient processing of multiple samples with a BIB system according to the present invention comprises affixing a sample to an adjustable portion of a sample holder, nesting the sample holder with a first mask having a first mask edge, wherein the first mask is positioned outside of a BIB system, and aligning the sample such that it has a desired geometric relationship to the first mask edge. The first mask may be geometrically similar with a second mask within the BIB system that has a second mask edge such that the geometric relationship between the first mask edge and the sample when the sample holder is nested with the first mask is the same as the geometric relationship between the second mask edge and the sample when the sample holder is nested with the second mask.