Dual Broad Ion Beam Sources for Low-Downtime Sample Preparation

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Solution Overview

Problem

Broad Ion Beam (BIB) polishing systems face inefficiencies due to the need for precise sample alignment and frequent cleaning of the ion source, leading to reduced workflow efficiency and downtime, limiting their use primarily to academic and non-commercial applications.

Innovation Solution

Implementing a dual BIB source system where one source can operate continuously while the other is removed for maintenance, using a valve to isolate the interior volume and maintain pressure and gas composition, allowing for uninterrupted sample processing and increased uptime.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single BIB source is used for sample processing, then the system structure is simple, but the system experiences downtime when the source needs cleaning or maintenance

Engineering Contradiction:
Improvesystem structureVSAvoidsystem uptime
Core Design Contradiction:
Device complexityVSProductivity

Solution Approach 1:

The system is divided into multiple independent BIB sources (first BIB source and second BIB source) that can operate independently. When one source needs maintenance, the other can continue processing samples, thereby eliminating downtime while maintaining overall system simplicity through modular design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system implements a workflow where one BIB source is actively processing samples while the other is being cleaned or maintained. The roles are then swapped, allowing continuous operation. This recovery process happens in parallel with sample processing rather than sequentially, maximizing uptime

Inventive Principle:
Principle #34Discarding and recovering

2Productivity

If high current broad ion beam is used to rapidly remove sample material, then sample preparation speed increases, but the rate of redeposition onto the source increases requiring more frequent cleaning

Engineering Contradiction:
Improvesample preparation speedVSAvoiddowntime for source cleaning
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

By having two BIB sources, the system ensures that while one source is actively removing material from samples at high speed, the other source can be cleaned or maintained without interrupting the sample preparation workflow. This continuous action eliminates idle time and maintains high productivity

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The system performs source cleaning and maintenance in advance during the time the other source is being used, so that when the first source needs maintenance, the second source is already ready to take over. This preliminary preparation of backup sources prevents workflow interruptions

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables more efficient and accurate processing of multiple samples by minimizing downtime and improving workflow efficiency, making BIB systems more suitable for commercial applications.

Implementation Method 1

BIB polishing systems directing a high energy, unfocused or minimally focused beams of ions (e.g., Argon ions) at a sample, where the beam degrades and/or otherwise removes the portions of the sample upon which it is incident

Methodology Applied
Scientific EffectIon beam: Ion Beam

Implementation Method 2

using a pump system to bring at least one of the pressure and gaseous composition of the housing volume to match that of the interior volume

Methodology Applied
Scientific EffectPressure equalization: Pressure Gradient

Data Source

PatentEP4279900A1Broad ion beam (BIB) systems for more efficient processing of multiple samples
Publication Date: 2023.11.22 FEI CO
  • EP4279900A1 patent drawingFigure 1
  • EP4279900A1 patent drawingFigure 2
  • EP4279900A1 patent drawingFigure 3

AI summary

Systems and methods for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime are disclosed. The broad ion beam (BIB) sample preparation system comprises a housing (128) defining an interior volume (130); a sample stage (114) positioned within the interior volume (130), wherein the sample stage is configured to hold a sample holder during polishing of a sample (104) held by the sample holder; a first BIB source (106) configured to emit a first broad ion beam (108) towards the sample (104) when in use, wherein the first BIB source (106) is positioned within a first source housing (138); and a second BIB source (148) configured to emit a second broad ion beam towards the sample (104) when in use, wherein the second BIB source (148) is positioned within a second source housing (142), wherein the second BIB source (148) is configured to be removed while the first BIB source (106) is emitting the first broad ion beam (108) towards the sample.