Bidirectional Short-Wave Radiation Illumination System
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Solution Overview
Problem
Conventional short-wave radiation (SWR) light sources, particularly those used in extreme ultraviolet (EUV) systems, face limitations in power, stability, and energy efficiency, making them unsuitable for high-volume manufacturing and industrial applications such as lithography and material processing.
Innovation Solution
A SWR system that employs a light assembly to illuminate an ionization target from both sides using distinct illumination schemes, with a controller managing the bidirectional illumination to enhance SWR emission, including the use of different light sources and timing parameters to optimize energy conversion and minimize neutral ejecta, thereby increasing the optical conversion efficiency and SWR output.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If conventional SWR light sources are used, then the system structure is simple, but the power and energy efficiency are limited
Solution Approach 1:
The illumination system is segmented into multiple independent light sources (first light source and second light source) that can illuminate the target from different sides. Each light source can be independently controlled and optimized, allowing the system to achieve higher total power while maintaining manageable complexity through modular design.
Solution Approach 2:
The patent transitions from conventional single-sided illumination to bidirectional illumination by adding the spatial dimension of illumination direction. By illuminating the target from both front and back sides simultaneously, the system doubles the effective illumination area and increases SWR output power without proportionally increasing system complexity.
2Use of energy by moving object
If conventional SWR light sources are used, then the system is simple to operate, but the optical conversion efficiency is low
Solution Approach 1:
The system employs dynamic control of illumination parameters including timing parameters that allow simultaneous or sequential illumination from both sides. The controller can adjust illumination duration, intensity, and timing to optimize energy conversion efficiency while managing the complexity through automated parameter coordination.
Solution Approach 2:
The patent changes key parameters of the illumination process by introducing bidirectional illumination geometry and controlling timing parameters. By adjusting these parameters, the system optimizes the interaction between light and target material, thereby improving optical conversion efficiency without requiring fundamental changes to the overall system architecture.
3Reliability
If conventional SWR light sources are used, then the system structure is simple, but the stability of SWR output is insufficient
Solution Approach 1:
The controller in the system monitors and coordinates the illumination process, using feedback mechanisms to maintain stable SWR output. By controlling the timing and intensity parameters of bidirectional illumination, the system compensates for variations in target material properties and environmental conditions, thereby improving output stability.
Solution Approach 2:
The system employs periodic or pulsed illumination patterns where the first and second light sources can be activated in controlled sequences. This periodic action allows for consistent reproduction of illumination conditions, improving the stability and reliability of SWR output while managing system complexity through rhythmic operation patterns.
4Productivity
If conventional SWR light sources are used, then the system is simple, but the productivity for high-volume manufacturing is limited
Solution Approach 1:
The patent merges the functionality of multiple light sources into a unified bidirectional illumination system that operates simultaneously. By combining the illumination capacity of both light sources targeting the same area from opposite directions, the system achieves doubled productivity for high-volume manufacturing while the integrated control architecture manages the added complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves a higher optical conversion efficiency and increased SWR emission, improving the power and stability of the SWR output, making it more suitable for industrial applications like lithography and material processing.
Implementation Method 1
a light assembly configured to illuminate a front side of an ionization target with first illumination and to illuminate a back side of the ionization target with second illumination, which results in emission of short-wave radiation from the target
Implementation Method 2
emission of short-wave radiation from the target
Data Source
AI summary
A Short-Wave Radiation (SWR) system comprising: (i) a light assembly, comprising at least one light source and being configured to: (a) illuminate a front side of an ionization target with first illumination; and (b) illuminate a back side of the ionization target with second illumination; (ii) a controller, configured to control the light assembly for illuminating the ionization target from the front side of the ionization target using the first illumination and at least partly concurrently illuminating the ionization target from the back side of the ionization target using the second illumination; and (iii) an optical assembly configured to collect SWR emitted from the front side of the ionization target and to direct the collected SWR toward a designated beam direction of the SWR system, wherein the SWR emitted from the front side results from a target illumination scheme that comprises at least the first illumination and the second illumination.