Binary Gas Purity Analyzer Using Mass Flow and Pressure Sensors
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Solution Overview
Problem
Existing methods for monitoring binary gas compositions in industrial processes, such as semiconductor manufacturing and thin-film coating, are not sufficiently accurate, cost-effective, or easily integratable into existing systems.
Innovation Solution
A method and system utilizing a species-dependent mass flow meter and a species-independent pressure sensor to sense the mass flow rate and total pressure of a binary gas mixture, providing an output representative of the relative concentration of one gas in the mixture.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If mass spectrometry or FTIR is used for binary gas analysis, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent replaces complex analytical instruments (mass spectrometry, FTIR) with simpler sensing devices - specifically a mass flow meter and pressure sensor - that use fundamental physical measurements (mass flow rate and total pressure) combined with mathematical calculation to achieve binary gas composition analysis, thereby reducing device complexity while maintaining measurement capability
Solution Approach 2:
The patent creates a simplified measurement model that copies the essential measurement function of complex instruments using basic sensors. By measuring mass flow rate and total pressure with simple devices and calculating composition through established relationships, the system replicates the analytical capability of sophisticated instruments without their complexity
2Measurement precision
If mass spectrometry or FTIR is used for binary gas analysis, then measurement precision is improved, but cost increases
Solution Approach 1:
The patent employs inexpensive, readily available sensing components (mass flow meter, pressure sensor) instead of expensive analytical instruments. These simple devices can be easily manufactured and replaced, providing cost-effective binary gas analysis suitable for broad industrial applications
3Measurement precision
If complex analytical instruments are used, then measurement precision is improved, but ease of operation is worsened
Solution Approach 1:
The patent uses universal, multi-functional sensing devices (mass flow meter and pressure sensor) that can be easily integrated into various gas delivery systems. These standard instruments perform multiple functions including flow measurement, pressure monitoring, and serve as the basis for composition calculation, making the system easy to operate and integrate across different applications
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables straightforward, low-cost, and accurate binary gas monitoring, suitable for a broad range of applications, with improved accuracy and reduced reliance on out-of-the-box equipment specifications.
Implementation Method 1
with a species-dependent mass flow meter, sensing a mass flow rate of a binary gas mixture
Data Source
AI summary
Systems and methods for detecting a composition of a binary gas mixture are provided. Such methods and systems include, with a species-dependent mass flow meter, sensing a mass flow rate of a binary gas mixture comprising gases of differing gas correction factors and, with a species-independent pressure sensor, sensing a total pressure of the binary gas mixture. An output representative of a relative concentration of one gas of the binary gas mixture is provided. The relative concentration is determined as a function of the sensed mass flow rate and the sensed total pressure.