Bio-based n-butyl acetate for negative tone development

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Solution Overview

Problem

The semiconductor industry faces challenges with existing organic solvents used in negative-tone development (NTD) processes, including toxicity, environmental concerns, flammability, and the need for solvents derived from renewable resources that can be processed through existing facilities.

Innovation Solution

Development of bio-based organic solvents, specifically a composition comprising at least 25 wt % bio-based n-butyl acetate with low metal element concentrations and minimal impurities, designed for use as developers and rinsing agents in NTD processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If petrochemically-derived solvents are used in NTD processes, then the solvents are commercially viable and readily available, but they contribute to greenhouse emissions and are non-renewable

Engineering Contradiction:

Improvecommercial viabilityVSAvoidgreenhouse emissions

Core Design Contradiction:

Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The patent changes the source parameter of the solvent from petrochemical to bio-based origin while maintaining the same chemical identity (n-butyl acetate). This parameter change allows the solvent to be renewable and reduce greenhouse emissions while remaining compatible with existing NTD processes and facilities.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If various organic solvents are used for NTD, then development performance is achieved, but toxicological and flammability issues arise

Engineering Contradiction:

Improvedevelopment performanceVSAvoidtoxicity and flammability

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent selects n-butyl acetate as the solvent because it offers a favorable balance between performance and safety. While all organic solvents have some level of toxicity and flammability, n-butyl acetate provides adequate development performance with relatively lower hazards compared to alternatives, making it a practical choice for industrial application.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

3Productivity

If existing organic solvents are used in NTD processes, then the processes are industrially applicable, but environmental concerns and limited renewable content persist

Engineering Contradiction:

Improveindustrial applicabilityVSAvoidenvironmental concerns

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The patent demonstrates that bio-based n-butyl acetate can serve the same function as petrochemical n-butyl acetate in NTD processes. The solvent maintains compatibility with existing equipment, process parameters, and performance requirements, allowing industries to adopt renewable solvents without restructuring their manufacturing systems.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS20250068079A1Bio-based solvents for negative tone development

Publication Date: 2025.02.27 HUSTAD PHILLIP DENE

AI summary

Non-aqueous bio-based organic solvents for use in lithographic processes are described, along methods of making and using such solvents. More specifically, the disclosure contemplates non-aqueous developer and rinsing compositions that are synthesized from biological or renewable sources and further, employing such bio-based developers to produce high resolution negative-tone images using a photoresist, and utilizing said bio-based rinsing agents for the negative tone development patterning processes.