Biological Detection Transistor Fabrication via Gate Segmentation
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Solution Overview
Problem
Existing microelectronic devices for detecting biological elements have insufficient electrical detection sensitivity and random distribution of nanowires, leading to inconsistent electrical characteristics and alignment issues during manufacturing.
Innovation Solution
A method for producing microelectronic devices that co-integrate transistors with a classic structure for logic circuits and biological detection transistors on the same substrate, using biological receptors fixed via organic layers to enhance sensitivity and stability, with precise control over the placement and dimensions of gate materials and insulating layers to improve alignment and sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional transistors are used for biological detection, then the device structure is simple, but the electrical detection sensitivity is insufficient
Solution Approach 1:
The transistor structure is segmented into distinct functional zones: a first zone with high doping concentration for stable electrical characteristics, and a second zone with low doping concentration for enhanced sensitivity to biological elements. This segmentation allows each zone to optimize its function, resolving the contradiction between sensitivity and structural simplicity.
Solution Approach 2:
Different regions of the transistor channel are assigned different doping concentrations to create local quality variations. The first zone (near source/drain) has high doping for stability, while the second zone (channel region) has low doping for sensitivity. This local differentiation enables the device to achieve both stability and high detection sensitivity without excessive complexity.
2Measurement precision
If nanowires are used for detection channels, then sensitivity is improved, but the random distribution causes alignment issues and inconsistent electrical characteristics
Solution Approach 1:
The patent replaces the mechanical/chemical growth process of random nanowire formation with a controlled semiconductor fabrication process. Instead of relying on random nanowire distribution, the invention uses precisely defined doped semiconductor zones with controlled geometry, eliminating alignment issues while maintaining high sensitivity through the low-doping channel region.
3Reliability
If biological receptors are fixed directly on the channel, then the detection capability is achieved, but the stability and consistency of electrical characteristics deteriorate
Solution Approach 1:
The transistor is segmented into a first zone for electrical stability (high doping) and a second zone for biological detection (low doping). By placing biological receptors specifically on the low-doping channel region while maintaining high-doping source/drain zones, the device achieves both stable electrical characteristics and effective biological detection capability.
Solution Approach 2:
The patent applies local quality by creating zones with different doping concentrations in specific locations. The high-doping zones provide stable electrical references, while the low-doping zones provide sensitive detection regions for biological receptors, allowing both stability and detection versatility to coexist.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables the production of microelectronic devices with improved sensitivity for detecting biological elements, capable of processing measurement signals and facilitating medical diagnostics by enhancing the alignment and stability of biological receptors, thus overcoming the limitations of existing devices.
Implementation Method 1
The fixation or grafting can be carried out via an organic layer or organic links (linker according to Anglo-Saxon terminology)
Data Source
Figure 1A~1C
Figure 1D~1F
Figure 1G~1I
AI summary
A method for making a microelectronic device having at least one biological element detection circuit comprising the steps of: a) fabricating, on a substrate, a plurality of transistors each comprising at least one gate (135, 136) formed of at least one layer based on at least one gate material (134) on at least one gate dielectric layer (132), said gate resting on a channel area (104a, 104b), - deposition of at least one layer based on at least one insulating material (141) covering said transistors, - fabrication of one or more holes (143) in said insulating material layer (141), so as to expose the upper face of the respective gate (135) of transistors referred to as "of a first type" among said transistors, while one or more other transistors, referred to as <<d'un deuxième type> >, among said transistors, are covered with insulating material (141), - filling of the holes (143) with gate material (134),chosen so as to be selectively etched with respect to the insulating material, the filling enabling the formation of blocks (145) based on said gate material (134) resting respectively on the upper face of the gates (135) of the transistors of the first type, b) removal of said blocks based on said gate material and at least partially from the respective gate (135) of the transistors of the first type, while the respective gate (136) of one or more other transistors, said <<transistors du deuxième type> >, among said transistors, is protected, c) fixation on a surface (S) located opposite the channel area of the transistors of the first type, of biological receptors intended to receive one or more biological markers (Mr,Mr1,Mr2,Mr3).,