Biosensor Gate Electrode Integration for Density

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Solution Overview

Problem

Current biosensors face challenges in efficiently detecting and measuring biomolecules due to limitations in sensitivity and device size, particularly in integrated circuits and microelectromechanical systems, where additional switches are often required to control on/off states, occupying valuable space and reducing density.

Innovation Solution

A biological device with a substrate, gate electrode, and sensing well is designed, where a depletion region is formed in the sensing region to detect biomolecules by measuring threshold voltage changes caused by charged analytes, eliminating the need for additional switches and enhancing sensitivity through plasma treatment or ion implantation processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If additional switches are used to control on/off states in biosensors, then the control functionality is improved, but the device size increases and density decreases

Engineering Contradiction:
Improvecontrol functionalityVSAvoiddevice size
Core Design Contradiction:
Ease of operationVSArea of stationary object

Solution Approach 1:

The patent merges the switch control function directly into the transistor gate structure. The gate electrode serves dual purposes: as the transistor control terminal and as the biosensing element. This integration eliminates the need for separate switch components, thereby maintaining control functionality while reducing device area and increasing density.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The gate electrode is designed to perform multiple functions: it acts as both the control terminal for the transistor (enabling on/off control) and as the sensing region for detecting biomolecules. This multi-functionality resolves the contradiction by eliminating the need for additional dedicated switch components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Area of stationary object

If device size is reduced to increase density, then the area occupied is reduced, but the sensitivity of biomolecule detection may deteriorate

Engineering Contradiction:
Improvedevice sizeVSAvoidsensitivity
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The patent applies local quality by creating a depletion region specifically in the sensing region of the transistor gate. This localized modification enhances the sensitivity of the sensing area without requiring an increase in overall device size. The depletion region concentrates the detection capability in a small, specific area, maintaining high sensitivity while preserving compact device dimensions.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the electrical parameters of the sensing region by forming a depletion region through plasma treatment or ion implantation. This parameter change (creating a depleted area with modified charge distribution) enhances the sensitivity of the sensing region, allowing compact devices to maintain high detection precision through optimized electrical characteristics rather than increased size.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach increases the sensitivity and density of biosensors by allowing for smaller device sizes and more efficient detection of biomolecules through threshold voltage measurements, without the need for additional switches, thereby improving the overall performance and compactness of biosensing devices.

Implementation Method 1

detect biomolecules by measuring threshold voltage changes caused by charged analytes

Methodology Applied
Scientific EffectElectrostatic interaction: Electrostatics

Implementation Method 2

enhancing sensitivity through plasma treatment or ion implantation processes

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Data Source

PatentUS11828722B2Biological device and biosensing method thereof
Publication Date: 2023.11.28 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11828722B2 patent drawing
  • US11828722B2 patent drawing
  • US11828722B2 patent drawing

AI summary

A biological device includes a substrate, a gate electrode, and a sensing well. The substrate includes a source region, a drain region, a channel region, a body region, and a sensing region. The channel region is disposed between the source region and the drain region. The sensing region is at least disposed between the channel region and the body region. The gate electrode is at least disposed on or above the channel region of the substrate. The sensing well is at least disposed adjacent to the sensing region.