Bipolar Electrode Bubble Detection in Photoresist Fluids
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Solution Overview
Problem
Existing methods for detecting bubbles in photoresist fluids used in semiconductor manufacturing are inadequate, as they struggle to accurately determine bubble size, leading to potential defects in semiconductor devices.
Innovation Solution
A bubble detection apparatus and method utilizing bipolar electrode units immersed in the fluid, where an electric field is applied across the fluid, and changes in current or voltage are measured to detect bubbles, allowing for the determination of bubble presence and size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical sensor or capacitor sensor is used to detect bubbles, then bubble detection is achieved, but determining the size of the bubbles is difficult
Solution Approach 1:
The patent replaces optical sensors and capacitor sensors with bipolar electrode-based electrical field detection. The bipolar electrodes generate an electric field that interacts with bubbles, causing measurable changes in current or voltage. This electrical field-based approach directly provides bubble size information through the magnitude of signal changes, eliminating the complexity of optical systems while improving measurement precision for bubble sizing.
Solution Approach 2:
The patent utilizes changes in electrical parameters (current or voltage) in response to bubble presence and size. By monitoring how the electrical field parameters change when bubbles pass through, the system can determine bubble size based on the degree of parameter change, providing both detection and sizing capability through a single measurement approach.
2Reliability
If prior art sensors are used, then bubble detection is possible, but accurate determination of bubble size is difficult leading to potential defects
Solution Approach 1:
The patent replaces optical and capacitor sensing methods with electrical field-based bipolar electrode detection. This substitution enables more reliable bubble size determination because the electrical field interaction provides direct information about bubble dimensions through current or voltage changes, thereby improving semiconductor device quality by enabling better quality control.
Solution Approach 2:
The system uses the electrical signal changes from bipolar electrodes as feedback to determine bubble presence and size. The current or voltage changes provide real-time information about bubbles in the photoresist fluid, allowing for immediate detection and response to potential defects before the fluid is dispensed, thereby improving overall system reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively detects and measures bubble size, preventing defects in semiconductor devices by ensuring the quality of the photoresist fluid before it is dispensed.
Implementation Method 1
a bias circuit configured to apply a driving potential across the pair of driving electrodes to generate an electric field
Implementation Method 2
a current or voltage detection device configured to detect a current or voltage between the first detection electrode and the second detection electrode
Data Source
AI summary
A bubble detection method includes flowing a fluid through a conduit containing at least one bipolar electrode, applying an electric field across the fluid in the conduit, and detecting a presence of a bubble in the fluid when the bubble flows around or through the bipolar electrode by detecting a current or voltage output from the at least one bipolar electrode.