Bipolar Electrostatic Chuck Refurbishing Without Electrode Separation
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Solution Overview
Problem
Conventional refurbishing processes for bipolar electrostatic chucks often damage the components due to the need for physical separation of electrodes and result in low yield, typically around 30%, as they are complex and prone to improper reassembly issues.
Innovation Solution
A refurbishing method that measures and maintains precise parameters like resistance, capacitance, and impedance without separating the electrodes, using quality checks and non-destructive techniques to seal gaps and reanodize the surface, ensuring the electrodes remain intact and functional.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If conventional refurbishing processes physically separate the electrodes to repair wear, then the electrodes can be accessed and cleaned, but the components are damaged and yield is low (around 30%)
Solution Approach 1:
The method segments the refurbishment process into distinct phases: measurement/evaluation, cleaning, sealing, and reanodization. This allows systematic repair without physical separation of electrodes, maintaining component integrity while achieving thorough maintenance.
Solution Approach 2:
The patent replaces mechanical separation methods with chemical and electrical processes. Instead of physically separating electrodes through mechanical means, the method uses chemical cleaning solutions and electrical reanodization processes to repair wear while keeping electrodes in place.
2Reliability
If electrodes are not separated during refurbishing, then component integrity is maintained, but gaps between electrodes cannot be sealed
Solution Approach 1:
The patent introduces sealant material as an intermediary substance that fills gaps between electrodes without requiring their separation. The sealant acts as a mediator that restores electrical isolation and mechanical integrity while maintaining the assembled structure.
Solution Approach 2:
The method changes the physical state and properties of materials during the process. The sealant transitions from liquid to solid state to fill gaps, and the reanodization process transforms the surface properties of aluminum electrodes, creating a functional dielectric layer.
3Reliability
If the anodized layer is removed and reapplied, then surface wear is repaired, but the process becomes more complex
Solution Approach 1:
The method performs preliminary measurement and evaluation of electrode parameters before proceeding with refurbishment. This preliminary assessment ensures that only electrodes within acceptable parameter ranges undergo the complex reanodization process, optimizing resource allocation and process efficiency.
Solution Approach 2:
The patent incorporates feedback mechanisms through parameter measurement and evaluation at multiple stages. Electrical parameters such as resistance and capacitance are measured before and after refurbishment to verify successful repair and guide subsequent processing steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces damage risk and achieves a yield close to 100% by maintaining the integrity of the electrostatic chuck components through precise parameter measurement and quality-controlled reassembly without physical separation of electrodes.
Implementation Method 1
These chucks use electrostatic forces to hold a semiconductor wafer in place during the manufacturing process
Implementation Method 2
The upper portion of top surface 306 has an anodized layer 318 disposed thereon
Data Source
AI summary
A bipolar electrostatic chuck refurbishing process in accordance with an aspect of the present invention does not require physical separation of the two electrodes of the electrostatic chuck. One aspect of the present invention is drawn to method of treating a bipolar electrostatic chuck having a front surface and a back surface and comprising a first electrode disposed at the front surface, a second electrode at the front surface and an anodized layer disposed on the front surface, the first electrode and the second electrode. The method comprises measuring a first parameter of the electrostatic chuck, discarding the electrostatic chuck if the first measured parameter is not within a first predetermined range, cleaning the electrostatic chuck if the first measured parameter is within the first predetermined range, sealing gaps between the first electrode and the second electrode at the front surface with a sealant, without displacing the first electrode relative to the second electrode, eliminating the anodized layer, and disposing a new anodized layer onto the front surface, the first electrode and the second electrode.