Bipolar TFT with Self-Assembly Layer for Mobility

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Solution Overview

Problem

Conventional thin-film transistors (TFTs) face challenges in achieving balanced n-type and p-type performance, with existing bipolar TFTs exhibiting poor mobility rates and stability, limiting their application in driving LCDs and solar cells due to the dominance of unipolar TFTs and the inefficiencies in fabricating p-type metal oxide TFTs.

Innovation Solution

A semiconductor thin film comprising stacked n-type and p-type semiconductor layers with an intermediate self-assembly layer, where the n-type layer can be an inorganic oxide like indium oxide and the p-type layer an organic semiconductor, such as pentacene, facilitated by a solution process, enhancing contact and mobility through the use of phosphate ester self-assembly materials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If oxide semiconductor materials are used for n-type TFTs, then carrier mobility rate is improved, but hole mobility rate remains low making p-type TFT fabrication difficult

Engineering Contradiction:
Improveelectron mobility rateVSAvoidp-type performance
Core Design Contradiction:
SpeedVSAdaptability or versatility

Solution Approach 1:

The invention divides the bipolar TFT into two separate unipolar TFTs (n-type and p-type) that are integrated to function as a single bipolar device. Each unipolar TFT is optimized for its respective carrier type, with the n-type using oxide semiconductor for high electron mobility and the p-type using appropriate materials for good hole mobility, thereby resolving the contradiction between achieving high electron mobility and maintaining p-type performance capability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention employs composite material structures where oxide semiconductor materials are used for the n-type channel to achieve high electron mobility, while separate material systems are used for the p-type channel to ensure good hole mobility. This composite approach allows each material to be optimized for its specific function, simultaneously achieving high electron mobility and adequate p-type performance

Inventive Principle:
Principle #40Composite materials

2Adaptability or versatility

If organic semiconductor materials are used for bipolar TFTs, then p-type performance is improved, but n-type performance and stability deteriorate

Engineering Contradiction:
Improvep-type performanceVSAvoidstability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The invention segments the bipolar device into separate n-type and p-type unipolar TFTs, allowing each to use materials optimized for its specific carrier type. The n-type TFT can use stable oxide semiconductor materials while the p-type TFT uses organic materials for good hole mobility, thereby achieving both stability and p-type performance without the trade-offs of using a single material system

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses composite material architecture where oxide semiconductor materials form the n-type channel providing high stability and electron mobility, while organic semiconductor materials form the p-type channel providing good hole mobility. This composite structure eliminates the need to compromise stability for p-type performance or vice versa

Inventive Principle:
Principle #40Composite materials

3Adaptability or versatility

If conventional bipolar TFT fabrication approaches are used, then bipolar operation is achieved, but performance and mobility rates remain poor

Engineering Contradiction:
Improvebipolar operationVSAvoidmobility rate
Core Design Contradiction:
Adaptability or versatilityVSSpeed

Solution Approach 1:

The invention achieves bipolar operation by integrating two separately optimized unipolar TFTs (n-type and p-type) into a single device structure. Each unipolar TFT is fabricated with materials and processes optimized for its specific carrier type, resulting in high mobility rates for both electrons and holes while maintaining bipolar functionality, thereby resolving the contradiction between achieving bipolar operation and maintaining high mobility rates

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the reliability, stability, and performance of TFTs, enabling bipolar operation with improved mobility and simplifying the manufacturing process, particularly for large-area and flexible electronic components.

Implementation Method 1

an intermediate layer over the first semiconductor layer; and forming a second semiconductor layer over the intermediate layer

Methodology Applied
Scientific EffectSelf-assembly: Self-Assembly

Data Source

PatentUS10868266B2Semiconductor thin-film and manufacturing method thereof, thin-film transistor, and display apparatus
Publication Date: 2020.12.15 BOE TECHNOLOGY GROUP CO LTD
  • US10868266B2 patent drawing
  • US10868266B2 patent drawing
  • US10868266B2 patent drawing

AI summary

A method for manufacturing a semiconductor thin film includes sequentially forming a first semiconductor layer, an intermediate layer, and a second semiconductor layer over a substrate. The first semiconductor layer and the second semiconductor layer can be one and another of an n-type semiconductor layer and a p-type semiconductor layer. At least one of the first semiconductor layer, the intermediate layer, or the second semiconductor layer is formed via a solution process. The n-type semiconductor layer can include indium oxide. The intermediate layer can include a self-assembly material. The p-type semiconductor layer can include a p-type organic semiconductor material, and can be pentacene. On the basis, a semiconductor thin film manufactured thereby, a semiconductor thin film transistor, and a display apparatus, are also disclosed.