Bipolar Transistor Ionization Damage Detection via DLTS

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Solution Overview

Problem

Existing methods fail to quickly and effectively characterize the positions of ionization damage in bipolar transistors, which affects their performance and reliability, especially under irradiation environments.

Innovation Solution

A detection method using deep level transient spectroscopy to identify ionization defects by analyzing bias voltage-dependent signal peaks, distinguishing between oxidation trapped charge and interface state defects, and determining sensitive areas of damage in bipolar transistors through irradiation tests with various radiation sources.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional detection methods are used to identify ionization damage in bipolar transistors, then the detection process is thorough, but the testing time is long and costs are high

Engineering Contradiction:
Improvedetection accuracyVSAvoidtesting time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The detection method segments the identification process into distinct stages: first identifying ionization defects through DLTS spectrum analysis, then classifying them as oxidation trapped charge or interface state based on signal levels, and finally determining sensitive areas. This segmentation enables rapid detection while maintaining accuracy by focusing on key diagnostic features rather than exhaustive analysis.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The method performs preliminary characterization of ionization defects by analyzing the positions of signal peaks in DLTS spectra before detailed classification. By pre-identifying the presence and types of defects through peak position analysis, the method reduces subsequent testing time while ensuring accurate detection of sensitive areas.

Inventive Principle:
Principle #10Preliminary action

2Measurement precision

If comprehensive detection of all defect types is performed, then detection completeness is improved, but device complexity and test complexity increase

Engineering Contradiction:
Improvedetection completenessVSAvoidtest complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The detection method applies local quality analysis by examining specific regions of the DLTS spectrum corresponding to different defect types. By analyzing signal levels at specific energy positions (comparing to band gap Eg), the method efficiently identifies oxidation trapped charge (level < αEg) and interface state (level > αEg) without requiring complex comprehensive analysis of the entire spectrum.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The method uses parameter changes in DLTS measurement (applying different bias voltages) to distinguish between ionization defects and inherent defects. By observing whether peak positions shift with bias voltage changes, the method simplifies defect identification while maintaining detection completeness.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If detailed analysis of defect signals is performed to identify sensitive areas, then detection accuracy is improved, but the complexity of signal analysis increases

Engineering Contradiction:
Improvedetection accuracyVSAvoidsignal analysis difficulty
Core Design Contradiction:
Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The method simplifies signal analysis by using clear parameter thresholds: comparing defect signal levels to αEg (where α is 0.2 to 0.5) to distinguish oxidation trapped charge from interface state, and observing peak position shifts with bias voltage to identify ionization defects. These parameter-based criteria reduce analytical complexity while maintaining high detection accuracy.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for rapid identification and evaluation of sensitive areas of ionization damage, reducing testing costs and advancing research on performance degradation and anti-radiation technologies for bipolar devices.

Implementation Method 1

installing the irradiated bipolar transistor on a test bench of a deep level transient spectroscopy system, and setting test parameters

Methodology Applied
Scientific EffectDeep level transient spectroscopy:

Implementation Method 2

The ionization effect can produce a large number of electron-hole pairs in the entire chip of the device

Methodology Applied
Scientific EffectIonization effect: Ionisation

Data Source

PatentUS12153082B2Detection method for sensitive parts of ionization damage in bipolar transistor
Publication Date: 2024.11.26 HARBIN INST OF TECH
  • US12153082B2 patent drawing
  • US12153082B2 patent drawing
  • US12153082B2 patent drawing

AI summary

The present invention provides a detection method for sensitive parts of ionization damage in a bipolar transistor, which includes the following steps: selecting an irradiation source, and carrying out irradiation test on the bipolar transistor to be tested; installing the irradiated bipolar transistor on a test bench of a deep level transient spectroscopy system, and setting test parameters; selecting at least two different bias voltages, and testing the bipolar transistor to obtain a deep level transient spectrum; determining whether a defect is an ionization defect according to a peak position of the defect signal in the deep level transient spectrum; determining the defect type as oxidation trapped charges or an interface state according to the level of the defect signal in the deep level transient spectrum; and determining the sensitive area of ionization damage in the bipolar transistor according to the determination result of the defect signal type.