Birefringent Polarizer Assembly for UV Spatial Separation
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Solution Overview
Problem
Existing birefringent polarizer assemblies, such as the Wollaston prism arrangement, face challenges in achieving optimal spatial separation of polarized light beams with minimal spatial extent and beam deviation, particularly in the ultraviolet spectral range, and are not suitable for use in compact optical setups due to beam orientation and reflection losses.
Innovation Solution
A polarizer assembly with a configuration of prisms where the first light entrance surface and further light exit surface are inclined in opposite directions relative to the principal light incidence direction, allowing for beam correction and alignment of one partial beam along the principal light incidence direction, reducing spatial and angular deviations, and incorporating wedges for further correction and achromatic properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a Wollaston prism arrangement is used for spatial separation of polarized light beams, then the spatial separation is achieved, but the spatial extent of the assembly increases and beam deviation occurs
Solution Approach 1:
The patent applies asymmetry by configuring the light exit surface of the last prism at a specific angle relative to the principal light incidence direction, rather than using symmetric perpendicular surfaces. This asymmetric configuration enables beam correction that reduces spatial extent while maintaining spatial separation of polarized light beams.
Solution Approach 2:
The patent changes the angular parameter of the light exit surface relative to the principal light incidence direction. By optimizing this angle, the assembly achieves minimal spatial extent while maintaining effective spatial separation of the polarized light beams, resolving the contradiction between separation quality and compactness.
2Length of stationary object
If the light exit surface is perpendicular to the principal light incidence direction, then the assembly is compact, but beam correction and alignment are insufficient
Solution Approach 1:
The patent deliberately uses an asymmetric configuration where the light exit surface is inclined at a specific angle rather than being perpendicular. This asymmetric design enables precise beam correction and alignment of the separated polarized light beams while maintaining a compact overall assembly size.
Solution Approach 2:
The patent addresses beam correction by introducing angular orientation in a different dimension. Instead of only considering the perpendicular distance from the incident beam, the solution uses the angular inclination of the exit surface to correct beam alignment, adding a dimensional parameter for precision control.
3Measurement precision
If conventional polarizer assemblies are used, then polarization separation is achieved, but reflection losses occur and modular installation is difficult
Solution Approach 1:
The patent creates a universal polarizer assembly design with a specific angular configuration that serves multiple functions: it achieves polarization separation, corrects beam alignment, reduces reflection losses, and enables modular installation. This multi-functional design resolves the contradiction by making the assembly adaptable to various optical setups while minimizing energy loss.
Solution Approach 2:
By optimizing the angular parameter of the light exit surface, the patent simultaneously reduces reflection losses and improves polarization separation efficiency. This parameter optimization resolves the contradiction between achieving effective polarization separation and minimizing energy loss through reflection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables efficient spatial separation of polarized light beams with minimal aberrations and beam offset, suitable for use in semiconductor inspection and imaging systems across a wide spectral range, including the ultraviolet, with reduced reflection losses and improved modular installation.
Implementation Method 1
A birefringent polarizer assembly is known from JP 2000-009932 A. The polarizer assembly includes at least two prisms constructed of a birefringent material
Implementation Method 2
a normal to the further light exit surface forms an angle not equal to 0° with the principal light incidence direction. the first light entrance surface and further light exit surface are inclined in opposite directions with respect to one another
Data Source
AI summary
The disclosure provides to a birefringent polarizer assembly for spatially separating polarization states of a light beam, in particular in the spectral range below 300 nm. The assembly includes a first prism on the light input side and a further prism on the light output side, which are arranged along a principal light incidence direction. The first prism has a first light entrance surface and a first light exit surface. The further prism has a further light entrance surface, facing the first light exit surface, and a further light exit surface. The prisms in each case have an optical principal crystal axis oriented substantially perpendicularly to the principal light incidence direction. The crystal axes of two adjacent prisms are oriented perpendicularly to one another. A normal to the further light exit surface forms an angle not equal to 0° with the principal light incidence direction.