Bismuth Brass Laser Chamber Electrodes Against Fluorine Erosion

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Solution Overview

Problem

In pulsed laser systems, fluorine-containing plasmas cause corrosive electrode erosion and reef formation, leading to beam quality degradation and reduced electrode lifespan due to arcing, necessitating frequent replacements.

Innovation Solution

A bismuth brass alloy with 30-40% zinc, 1-10% bismuth, and the balance copper, which forms a protective layer inhibiting fluorine reaction with the base metal, reducing corrosion and extending electrode life.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of stationary object

If traditional brass electrodes are used in fluorine-containing plasma, then the electrode material is simple and inexpensive, but the electrodes suffer from severe corrosion and erosion leading to short lifetime

Engineering Contradiction:
Improveelectrode lifetimeVSAvoidcorrosion and erosion from fluorine plasma
Core Design Contradiction:
Duration of action of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The patent applies composite materials by creating a multi-layer electrode structure consisting of a brass base metal (copper-zinc alloy) combined with a bismuth-containing protective layer. This composite structure combines the electrical conductivity and mechanical strength of brass with the corrosion resistance of bismuth, allowing the electrode to withstand fluorine plasma environments while maintaining functional performance. The bismuth layer acts as a protective barrier that prevents direct contact between fluorine and the brass substrate, thereby extending electrode lifetime.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The bismuth-containing layer serves as an intermediary between the fluorine plasma and the brass base metal. This intermediate layer reacts with fluorine to form protective fluorides that block further corrosion, mediating the harmful interaction between fluorine and the electrode material. The bismuth acts as a sacrificial protective layer that preserves the underlying brass structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If electrodes are frequently replaced due to corrosion, then beam quality is maintained, but system productivity decreases and operational time is lost

Engineering Contradiction:
Improvelaser system operational efficiencyVSAvoidelectrode performance stability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The bismuth-containing protective layer is applied to the electrode surface before the electrode is put into service. This preliminary protective action ensures that the electrode is pre-equipped with corrosion resistance, preventing performance degradation before it occurs. The protective layer is formed in advance through plating or coating processes, so the electrode is ready for immediate use without requiring frequent maintenance interruptions.

Inventive Principle:
Principle #10Preliminary action

3Object-affected harmful factors

If higher zinc content is used in brass alloy to improve corrosion resistance, then resistance to fluorine attack increases, but dezincification becomes more severe leading to surface non-uniformity

Engineering Contradiction:
Improveresistance to fluorine corrosionVSAvoidalloy composition uniformity
Core Design Contradiction:
Object-affected harmful factorsVSStability of the object's composition

Solution Approach 1:

The bismuth-containing layer acts as an intermediary barrier that prevents fluorine from directly attacking the zinc-rich brass alloy. This protective layer allows the use of higher zinc content brass (30-40% Zn) for improved inherent corrosion resistance without suffering from dezincification, because the bismuth layer blocks fluorine penetration to the zinc-containing base metal.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The electrode combines a high-zinc brass base metal (providing corrosion resistance and mechanical properties) with a bismuth-containing protective layer (providing fluorine barrier protection). This composite structure allows the zinc-rich alloy to be used without dezincification issues, as the bismuth layer protects the zinc from fluorine attack.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The bismuth brass alloy significantly reduces corrosion rates, potentially extending electrode life to 60 billion pulses or more by blocking fluorine diffusion and preventing dezincification, thus enhancing the reliability and cost-effectiveness of pulsed laser systems.

Implementation Method 1

Bismuth, as a very fluorine-resistant alloy, blocks the diffusion of fluorine into the lattice

Methodology Applied
Scientific EffectDiffusion barrier: Diffusion Barrier

Implementation Method 2

In the presence of fluorine, a protective layer forms on the elongated surface of the body of the electrode, and this protective layer inhibits reaction of the base metal formed of copper and zinc with fluorine

Methodology Applied
Scientific EffectProtective layer formation: Coatings

Data Source

PatentUS11987871B2Electrodes for laser chambers having extended lifetime
Publication Date: 2024.05.21 CYMER INC
  • US11987871B2 patent drawing
  • US11987871B2 patent drawing
  • US11987871B2 patent drawing

AI summary

An electrode is formed of a bismuth brass alloy. The bismuth brass alloy contains about 30 weight percent to about 40 weight percent of zinc, about 1 weight percent to about 10 weight percent of bismuth, and the balance copper. The bismuth brass alloy has a microstructure that includes islands of bismuth dispersed within the base metal formed of copper and zinc and also includes bismuth at the grain boundaries of the base metal. As a large bulky atom with high resistivity against fluorine attack, bismuth segregates at the grain boundaries and blocks the fluorine diffusion into the lattice. In the presence of fluorine, the bismuth brass alloy forms a protective layer on the elongated surface of the body of the electrode. This protective layer inhibits reaction of the base metal formed of copper and zinc with fluorine and thereby preserves the surface of the electrode material.