Bistable Actuator Fluid Sealing for Low Energy Microsystem Integration

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Solution Overview

Problem

In microsystems technology, there is a challenge in arranging and integrating hundreds or thousands of actuators in a compact, energy-efficient, and reliable manner, particularly in achieving high integration density and scalable actuator arrangements.

Innovation Solution

A bistable actuator method involving an actuator fluid supply connected to an actuator chamber, where an overpressure is applied to move the actuator element from a rest position to an actuation position, and a pressure-tight sealing mechanism maintains the working pressure, allowing the actuator to remain in either position without further energy input.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional actuators are used with continuous energy supply to maintain position, then positioning accuracy is improved, but energy consumption increases

Engineering Contradiction:
Improvepositioning accuracyVSAvoidenergy consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The actuator uses periodic pulsing of the fluid supply to achieve position changes, rather than continuous energy supply. The bistable mechanism maintains positions without continuous energy input, consuming energy only during state transitions.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The actuator element itself provides the energy storage function through its bistable design, eliminating the need for continuous external energy supply to maintain position. The system serves itself by using the actuator's inherent stability to hold position.

Inventive Principle:
Principle #25Self-service

2Productivity

If hundreds or thousands of actuators are integrated in microsystems, then productivity is improved, but device complexity increases

Engineering Contradiction:
Improveintegration densityVSAvoidactuator arrangement complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

Multiple actuators share a common fluid supply system, merging the fluid delivery infrastructure. This reduces the overall complexity compared to having separate fluid supplies for each actuator, while still allowing high integration density.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The actuator array is segmented into individually addressable units, each with its own control valve. This allows independent control of each actuator while sharing common infrastructure, managing complexity through modular organization.

Inventive Principle:
Principle #1Segmentation

3Stability of the object's composition

If overpressure is continuously applied to maintain actuator position, then positioning stability is improved, but loss of energy increases

Engineering Contradiction:
Improveposition stabilityVSAvoidenergy waste
Core Design Contradiction:
Stability of the object's compositionVSLoss of energy

Solution Approach 1:

The continuous overpressure requirement is extracted and removed from the system. Instead of continuously applying overpressure, the bistable mechanism captures and stores the pressure effect during brief pulsing events, eliminating continuous energy waste.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The system changes the pressure parameter from continuous overpressure to pulsed overpressure. The bistable actuator responds to transient pressure changes and maintains position without requiring sustained pressure, reducing energy loss.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient energy use by requiring only energy to change the actuator position initially, with both rest and actuation positions being stable without additional energy, and allows for scalable integration of actuators in microsystems.

Implementation Method 1

Application of an overpressure in an actuator fluid supply, which is fluidically connected to an actuator chamber by means of an actuator fluid supply connection, wherein an excess working pressure is generated in the actuator chamber

Methodology Applied
Scientific EffectFluid pressure transmission: Pascal's Law

Implementation Method 2

pressure-tight sealing of the actuator fluid supply use so that the working pressure in the actuator chamber is maintained and the actuator element remains in the actuating position

Methodology Applied
Scientific EffectPressure sealing:

Data Source

PatentEP2828537B1Bistable actuator, actuator assembly, method of actuation and use
Publication Date: 2020.12.30 KARLSRUHER INST FUR TECH
  • EP2828537B1 patent drawingFigure 1i~1vi
  • EP2828537B1 patent drawingFigure 2i~2viii
  • EP2828537B1 patent drawingFigure 3i~3vi

AI summary

The invention relates to a method for the bistable actuation of an actuator, comprising the following steps: - creation of overpressure in an actuator fluid feed that has a fluid connection with an actuator chamber by means of an actuator fluid feed connection, wherein a working overpressure is created in the actuator chamber, as a result of which an actuator element fluidly connected to the actuator chamber is shifted from a resting position to an actuation position; - pressure-tight sealing of the actuator fluid feed use so that the working pressure in the actuator chamber is retained and the actuator element remains in the actuation position, the invention further relating to an actuator, an actuator arrangement and a use thereof.