3D Memory Bit-Line Pillars for Thermal Management

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Solution Overview

Problem

As integrated circuits (ICs) scale down, wire performance and functionality degrade, leading to increased power consumption and limitations in 3D stacked semiconductor devices, where existing techniques struggle to efficiently manage wire lengths and thermal management in 3D memory and logic circuits.

Innovation Solution

The development of 3D Integrated Circuit (IC) devices with vertically oriented bit-line pillars connected to memory transistors, featuring metallic properties, thermal paths, and crystallized polysilicon channels, along with advanced layer transfer technologies for heterogeneous integration, enabling efficient heat removal and improved performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional 3D stacking techniques are used, then transistor density is improved, but wire performance degrades and power consumption increases

Engineering Contradiction:
Improvetransistor densityVSAvoidpower consumption
Core Design Contradiction:
Quantity of substanceVSLoss of energy

Solution Approach 1:

The patent transitions from conventional planar interconnects to vertically oriented bit-line pillars, moving the interconnect architecture into the third dimension. This dimensional change allows transistors to be stacked vertically while maintaining efficient vertical connections through the pillars, reducing the need for long horizontal wire runs that consume power and limit performance.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Loss of time

If wire length is reduced through 3D stacking, then wiring delay is reduced, but thermal management becomes more challenging

Engineering Contradiction:
Improvewiring delayVSAvoidthermal management
Core Design Contradiction:
Loss of timeVSTemperature

Solution Approach 1:

The patent introduces thermal pathways as intermediary structures that facilitate heat removal from the densely packed 3D memory architecture. These thermal pathways act as mediators between the heat-generating transistors and the heat dissipation mechanisms, enabling effective thermal management in the compact 3D structure where wiring delay is minimized.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Length of stationary object

If vertically oriented bit-line pillars are implemented, then wire length is reduced, but device complexity increases

Engineering Contradiction:
Improvewire lengthVSAvoiddevice complexity
Core Design Contradiction:
Length of stationary objectVSDevice complexity

Solution Approach 1:

The vertically oriented bit-line pillars serve multiple functions simultaneously: they act as electrical interconnects for memory access, provide thermal pathways for heat dissipation, and enable the 3D stacking architecture. This multi-functionality reduces the need for separate structures, thereby limiting the increase in device complexity despite the architectural transformation.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces wire lengths, enhances memory cell performance, and improves thermal management, leading to increased efficiency and reduced power consumption in 3D memory devices, while allowing for innovative IC devices with reduced development costs and simpler process flows.

Implementation Method 1

thermal paths... enabling efficient heat removal

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

crystallized polysilicon channels... connected to memory transistors

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11763864B23D memory semiconductor devices and structures with bit-line pillars
Publication Date: 2023.09.19 MONOLITHIC 3D INC
  • US11763864B2 patent drawing
  • US11763864B2 patent drawing
  • US11763864B2 patent drawing

AI summary

A 3D memory device, the device including: a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel; and a plurality of bit-line pillars, where each bit-line pillar of the plurality of bit-line pillars is directly connected to a plurality of the source or the drain, where the plurality of bit-line pillars are vertically oriented, where the channel is horizontally oriented, where a plurality of the channels are connected to a body pillar, and where the body pillar is at least temporary connected to a negative bias.