BKM Driven Recipe Editor for Plasma Processing
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Solution Overview
Problem
Manual entry of complex plasma processing recipes is prone to human error, leading to costly substrate waste due to incompatibility with processing system hardware and lack of flexibility in updating recipes, with existing methods either being inflexible or error-prone.
Innovation Solution
A best-known method driven recipe editor that incorporates best practice specifications into BKM modules, allowing users to enter values within defined rules, ensuring compatibility and reducing errors by encapsulating rules and parameters, and enabling experts to modify or create new BKM modules for proprietary recipes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If manual entry of recipe values onto a large monolithic spreadsheet is used, then users have flexibility to enter and change values, but the process is prone to human error and requires extensive user expertise
Solution Approach 1:
The patent segments the large monolithic spreadsheet into multiple smaller, organized sections or modules. Each section contains specific recipe parameters grouped by function or process step, making the data entry process more manageable and less error-prone while maintaining user flexibility.
Solution Approach 2:
The patent introduces an intermediary system between the user and the recipe parameters - a structured template or form-based interface that guides users through data entry. This intermediary enforces data validation rules, ensures proper formatting, and prevents erroneous entries while still allowing users to input and modify values.
2Reliability
If hard-coding of recipes is employed, then human error is minimized, but updates and adjustments to recipes become burdensome and require software code changes
Solution Approach 1:
The patent creates a dynamic recipe management system where recipe parameters are stored in a structured, editable format rather than being fixed in code. The system allows runtime modification of recipe values through the user interface, enabling easy updates without requiring software development resources.
Solution Approach 2:
The patent implements a template-based system where standard recipe templates can be copied and reused. Once a template is created with proper validation rules, it can be instantiated multiple times and easily modified, eliminating the need to recreate recipes from scratch and simplifying update processes.
3Ease of operation
If manual entry of recipe values is performed without integration with processing system hardware, then users can enter data freely, but compatibility issues with hardware configuration settings may cause severe damages
Solution Approach 1:
The patent implements automated feedback mechanisms that compare user-entered recipe values against hardware configuration settings and validation rules. The system provides real-time feedback to users about compatibility issues, warning them of potential problems before the recipe is executed, thereby preventing hardware damage.
Solution Approach 2:
The patent performs preliminary validation and compatibility checking of recipe parameters before they are executed on the hardware. The system pre-checks all entered values against hardware capabilities and configuration settings, identifying and preventing incompatible recipes from being run, thus avoiding potential hardware damage.
Data Source
AI summary
A method for affecting a creation of a recipe for processing a substrate in a processing system. The method includes providing a best-known method driven recipe editor. The best-known method driven recipe editor incorporates best-known methods (BKMs), which are best practice specifications for the recipe. The method also includes creating a plurality of BKM modules based on the BKMs for the recipe. The method further includes defining rules for parameters in the plurality of BKM modules. The rules are propagated by the BKMs. The methods moreover includes creating a BKM driven recipe by employing the best-known method driven recipe editor to enter values for the parameters within the guidelines of BKM rules.