Black Matrix Patterning with Sacrificial Layers for Alignment Accuracy
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Solution Overview
Problem
The manufacturing of black matrices in display technology is hindered by low position accuracy and poor display effects due to alignment issues with black materials, limiting process window and device performance.
Innovation Solution
A method involving a sacrificial layer with sacrificial patterns is used to form a light shielding film layer, allowing separation of first and second light shielding patterns, which are then removed to create a black matrix with higher accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a black material is used to form the black matrix, then the light shielding function is improved, but the alignment accuracy deteriorates because the black material blocks the alignment structure
Solution Approach 1:
The patent segments the black matrix formation process into multiple stages: first forming a sacrificial layer with sacrificial patterns that do not block alignment, then forming the light shielding film layer, and finally removing the sacrificial layer to create the black matrix. This segmentation allows the alignment structure to remain visible during patterning while achieving the light shielding function in the final product.
Solution Approach 2:
The patent performs preliminary actions by first forming the sacrificial layer and sacrificial patterns before forming the light shielding film layer. The sacrificial patterns are created using exposure and development processes that do not involve black materials, allowing accurate alignment. The light shielding film is then deposited over these sacrificial patterns, and finally the sacrificial layer is removed to reveal the precisely positioned black matrix structure.
2Manufacturing precision
If different exposure alignment forms are combined to improve black matrix alignment, then the position accuracy is improved, but the device complexity increases
Solution Approach 1:
The patent introduces a sacrificial layer as an intermediary element that facilitates the formation of the black matrix without interfering with the alignment process. The sacrificial patterns serve as temporary placeholders that guide the deposition of the light shielding film layer. This intermediary approach simplifies the overall process compared to combining multiple exposure alignment forms, as it uses a single straightforward deposition step followed by sacrificial layer removal.
3Ease of manufacture
If the light shielding film layer is formed continuously without separation, then the manufacturing process is simplified, but the position accuracy of the black matrix deteriorates
Solution Approach 1:
The patent segments the light shielding film layer into first light shielding patterns and second light shielding patterns that are separated by the sacrificial patterns. This segmentation is achieved by forming the light shielding film layer over the sacrificial layer, where the sacrificial patterns act as spacers. The separation is then completed by removing portions of the light shielding film layer through ashing, creating distinct first and second light shielding patterns with precise positioning that would be difficult to achieve with a continuous film.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enhances position accuracy and display quality by enabling precise patterning of the black matrix, reducing thickness and improving brightness and contrast in OLED displays.
Implementation Method 1
removing the sacrificial layer and the second light shielding pattern, and forming the black matrix... dissolving the sacrificial layer by a developer, and cleaning and peeling off the sacrificial layer and the second light shielding pattern arranged on the sacrificial layer
Implementation Method 2
removing a part of the light shielding film layer located between the first light shielding pattern and the second light shielding pattern by an ashing process
Data Source
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AI summary
The present disclosure provides a black matrix and a method for manufacturing the same, and a color filter substrate and a method for manufacturing the same. The method for manufacturing the black matrix includes: providing a substrate; forming a sacrificial layer on the substrate, the sacrificial layer including a plurality of sacrificial patterns; forming a light shielding film layer on the sacrificial layer, wherein the light shielding film layer includes a plurality of first light shielding patterns and a plurality of second light shielding patterns, and each of the second light shielding patterns and an adjacent first light shielding pattern are separated by the sacrificial pattern; removing the sacrificial layer and the second light shielding pattern and forming the black matrix.