Alkali-Developable Black Photosensitive Resin Composition for Light-Shielding Barrier Walls
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Solution Overview
Problem
Current black photosensitive resin compositions struggle to form light-shielding barrier walls with a height of not less than 20 μm through photolithography, experiencing issues with undercutting and insufficient curing depth, which affects resolution and adhesiveness, especially in deep portions of the coating film.
Innovation Solution
An alkali-developable black photosensitive resin composition comprising a carboxyl group-containing photosensitive prepolymer, a photopolymerization initiator, a black pigment, and light-transmitting fine particles, such as silica, which enhances curing properties and resolution by allowing actinic energy rays to reach deeper layers, preventing undercutting and improving light-shielding effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a black pigment is contained in a large amount to make the composition black for light-shielding, then the light-shielding effect is improved, but the curing depth becomes insufficient and undercutting occurs during development
Solution Approach 1:
The patent changes the chemical composition parameters of the photosensitive resin by incorporating specific components (carboxyl group-containing photosensitive resin, photopolymerization initiator, and light-transmitting fine particles) that modify how the composition responds to actinic radiation, enabling deep curing despite high black pigment content
Solution Approach 2:
The patent creates a composite photosensitive composition combining multiple functional components: carboxyl group-containing photosensitive resin, photopolymerization initiator, black pigment, and light-transmitting fine particles. This composite structure allows the system to simultaneously achieve light-shielding and deep curing capabilities
2Manufacturing precision
If the exposure dose is increased to improve the curing property in a deep portion, then the curing depth is improved, but halation becomes large and resolution decreases
Solution Approach 1:
The patent changes the photosensitive composition parameters to include light-transmitting fine particles and specific photopolymerization initiators that enable efficient curing at lower exposure doses, preventing halation while achieving sufficient curing depth
Solution Approach 2:
The light-transmitting fine particles act as intermediaries that facilitate the penetration and effective utilization of actinic energy rays throughout the coating film thickness, enabling uniform curing without excessive exposure that would cause halation
3Object-affected harmful factors
If a light-shielding barrier wall with a height of not less than 20 μm is formed by photolithography, then the light-shielding effect is improved, but undercutting occurs and adhesiveness deteriorates
Solution Approach 1:
The patent uses a composite photosensitive composition with carboxyl group-containing photosensitive resin that provides both deep curing capability and good adhesion to substrates, enabling formation of tall light-shielding barrier walls without undercutting or adhesion loss
Solution Approach 2:
The patent modifies the chemical parameters of the photosensitive resin system to achieve uniform vertical curing through the entire 20 μm or greater thickness, preventing the undercutting phenomenon that would compromise adhesion at the base of the barrier wall
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composition achieves sufficient light-shielding without undercutting, with a transmittance of 5% or less, and maintains high resolution and thermal stability, suitable for forming thick patterned films with improved adhesiveness and thermal stability.
Implementation Method 1
a photopolymerization initiator, which generates radical species by irradiation of light
Implementation Method 2
a black pigment, and (D) light-transmitting fine particles... sufficient light-shielding effect
Data Source
AI summary
An alkali-developable black photosensitive resin composition for forming a light-shielding barrier wall which comprises, as indispensable components, (A) a carboxyl group-containing photosensitive prepolymer, (B) a photopolymerization initiator, (C) a black pigment, and (D) light-transmitting fine particles. By the use of this composition, light-shielding barrier walls (11) having sufficient light-shielding properties and a height of not less than 20 μm can be formed by photolithography, without causing undercutting during development. In a preferred embodiment, the black pigment (C) is a metal oxide, preferably iron oxide, and the fine particles (D) are inorganic fine particles having a refractive index of 1.40-1.90, preferably silica.