Black Synthetic Quartz Glass with Transparent Layer
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Solution Overview
Problem
Conventional black quartz glasses are insufficient in light-shielding properties, prone to bubbles and contamination, and face challenges in bonding with transparent quartz glass, especially in high-temperature semiconductor production processes, where they also suffer from heat loss and thermal shock.
Innovation Solution
A method for producing black synthetic quartz glass with a transparent layer involves a gas-phase reaction of a silica porous glass body with a volatile organosilicon compound, followed by firing and coating with silica slurry, then sintering in an oxidizing atmosphere to achieve high light-shielding, thermal resistance, and purity, while preventing carbon release and bubble formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional black glass is used for light shielding, then light-shielding property is provided, but light-shielding property is insufficient and metal impurities cause contamination
Solution Approach 1:
The patent changes the chemical composition parameters by using carbonized silica powder instead of metal oxide additives, and controls the carbon content within 5-50,000 ppm to achieve both effective light-shielding property and high purity without metal impurity contamination
Solution Approach 2:
The patent creates a composite material system combining silica glass matrix with carbonized organic binder, where the carbonized organic binder provides light-shielding functionality while the silica glass matrix maintains high purity and prevents metal contamination
2Object-affected harmful factors
If carbon is dissolved in glass network to create black glass, then light-shielding property is improved, but mechanical and thermophysical properties change causing bonding difficulties
Solution Approach 1:
The patent precisely controls the carbon content parameter within 5-50,000 ppm range and regulates the sintering temperature and pressure parameters to achieve optimal balance between light-shielding property and bonding compatibility, preventing excessive property changes
Solution Approach 2:
The patent creates a transparent layer with different composition and properties on the surface of the black glass body, where the transparent layer has optimized properties for bonding while the bulk black glass maintains light-shielding functionality
3Illumination intensity
If transparent quartz glass is used for optical cell, then light transmission property is provided, but heat loss due to infrared radiation occurs
Solution Approach 1:
The patent divides the optical cell into two functional segments: a transparent quartz glass portion for light transmission and a black synthetic quartz glass portion for infrared shielding, allowing each segment to perform its specific function optimally
Solution Approach 2:
The patent creates a composite structure combining transparent quartz glass and black synthetic quartz glass with different optical properties, where the transparent layer provides light transmission and the black layer provides infrared absorption, achieving both functions simultaneously
4Object-affected harmful factors
If black glass is bonded to transparent quartz glass, then light-shielding function is achieved, but bonding is difficult and cracks occur under heating
Solution Approach 1:
The patent creates a transparent layer on the surface of the black glass body with different thermal and mechanical properties, where this surface layer facilitates bonding with transparent quartz glass while the bulk black glass maintains light-shielding functionality
Solution Approach 2:
The patent controls the sintering temperature and pressure parameters during manufacturing to create optimal bonding conditions, and adjusts the composition parameters of the transparent layer to ensure compatibility with transparent quartz glass, preventing cracks under heating
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resulting black synthetic quartz glass exhibits excellent light-shielding, high-temperature viscosity, and purity, allowing for seamless bonding and use in semiconductor production without thermal deformation or contamination, while maintaining high emissivity and light-shielding properties.
Implementation Method 1
subjecting a silica porous glass body containing a hydroxy group to a gas-phase reaction in an atmosphere of a volatile organosilicon compound
Implementation Method 2
firing the resultant at a temperature of 1,200° C. or more and 2,000° C. or less
Implementation Method 3
keeping the resultant within the temperature range of 1,300° C. to 2,000° C. and the pressure range of 0.001 to 1.0 MPa to perform sintering
Implementation Method 4
performing heating treatment in an oxidizing atmosphere in the temperature region of 300° C. to 1,200° C.
Data Source
AI summary
Provided in a facile manner are a black synthetic quartz glass with a transparent layer, which meets demands for various shapes, has a black portion satisfying required light shield property and emissivity in an infrared region, keeps a purity equivalent to that of a synthetic quartz glass in terms of metal impurities, has a high-temperature viscosity characteristic comparable to that of a natural quartz glass, can be subjected to high-temperature processing such as welding, does not release carbon from its surface, and is free of bubbles and foreign matter in the transparent layer and the black quartz glass, and at an interface between the transparent layer and the black quartz glass, and a production method therefor.