Cutting Blade Mount Pressure Check for Defective Nut Engagement
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Solution Overview
Problem
The existing cutting apparatuses for semiconductor wafers often result in oblique cutting or damage to the cutting blade due to an improperly aligned screw-engaged state of the fixed nut with the spindle, leading to insufficient blade fixation.
Innovation Solution
A cutting apparatus equipped with a determining unit that uses pressure and flow rate measurements through dedicated flow paths to assess the screw-engaged state of the fixed nut, preventing defective mounting by informing the operator of any abnormal values detected.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the fixed nut is screwed to the boss section, then the cutting blade is clamped and fixed to the spindle, but if the screw-engaged state is defective (oblique inclination), then the cutting blade is not sufficiently fixed, causing oblique cutting or damage to the cutting edge
Solution Approach 1:
The patent performs a preliminary check of the screw-engaged state before cutting operations by introducing fluid pressure through the first flow path during the blade mounting process. The measuring device detects pressure abnormalities that indicate defective engagement (oblique inclination) before the cutting blade is used, preventing potential damage and ensuring reliable fixation from the start.
Solution Approach 2:
The patent implements a feedback mechanism where the measuring device continuously monitors the fluid pressure in the first flow path during blade mounting. When the screw-engaged state is defective, the pressure deviates from the normal range, providing immediate feedback to the control device, which then prevents cutting operations until the issue is corrected.
2Manufacturing precision
If the fixed nut is properly aligned with the center axis of the boss section, then accurate cutting is achieved, but it is difficult to detect misalignment during the mounting process
Solution Approach 1:
The patent introduces fluid (air or water) as an intermediary substance that flows through the first flow path formed in the mounter. The fluid pressure serves as a mediator to transmit information about the alignment state: when the fixed nut is properly aligned, the fluid flows smoothly with normal pressure; when misaligned, the pressure changes, providing detectable information about the alignment state without directly measuring the mechanical position.
3Productivity
If cutting operations are performed without checking the screw-engaged state, then productivity is maintained, but damage to the cutting edge or workpiece may occur
Solution Approach 1:
The patent performs a preliminary pressure check through the first flow path immediately after blade mounting and before cutting operations begin. This preliminary action quickly identifies defective screw-engaged states, allowing operators to correct alignment issues before they cause damage, thus preventing harmful effects while minimizing interruptions to productivity.
Solution Approach 2:
The control device receives real-time feedback from the measuring device about the fluid pressure in the first flow path. When abnormal pressure indicates a defective screw-engaged state, the control device provides feedback to prevent cutting operations, thereby avoiding damage to the cutting edge or workpiece while maintaining productivity by enabling quick correction and resumption of operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents the start of cutting operations when the cutting blade is not properly mounted, thereby avoiding oblique cuts and blade damage, ensuring accurate and safe processing of semiconductor wafers.
Implementation Method 1
a second flow path that is connected to the first flow path in the mounter for causing a negative pressure or a positive pressure to act on the first flow path
Implementation Method 2
a second flow path that is connected to the first flow path in the mounter for causing a negative pressure or a positive pressure to act on the first flow path
Implementation Method 3
a measuring device that obtains a measured value of at least one of a pressure in the second flow path and a flow rate of a fluid flowing through the second flow path
Implementation Method 4
a measuring device that obtains a measured value of at least one of a pressure in the second flow path and a flow rate of a fluid flowing through the second flow path
Data Source
AI summary
A cutting apparatus includes a cutting unit that has a spindle with an annular cutting blade mounted to a tip part of the spindle through a blade mount, and a determining unit. The determining unit has a second flow path that is connected to a first flow path in a mounter of the blade mount for causing a negative or positive pressure to act on the first flow path, a measuring device that obtains a measured value of at least one of a pressure and a flow rate in the second flow path, and a screw-engaged state determining section that determines that a screw-engaged state of a fixed nut with a boss section of the mounter where the cutting blade is disposed is defective in a case where the measured value when the negative or positive pressure acts on the first flow path indicates an abnormal value.