Cutting Blade Position Detection via Non-Overlapping Grooves
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Solution Overview
Problem
The existing methods for detecting the position of a cutting blade in wafer processing are inefficient, as they require multiple test cuts on a single workpiece, leading to increased material usage and costs, especially when using thick cutting blades for edge trimming, where the width of the cut grooves limits the number of grooves that can be formed.
Innovation Solution
A cutting blade position detecting method that involves forming a second groove on a workpiece without overlapping one end portion with the first groove, allowing for non-overlapping cuts and enabling more grooves to be formed on a single sheet, thereby reducing material usage and costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple test cuts are performed on a single workpiece to detect cutting blade position, then the detection accuracy is improved, but the material consumption increases
Solution Approach 1:
The invention segments the groove formation process by creating multiple grooves in sequence on the same workpiece. Each groove serves as an independent measurement feature for detecting the cutting blade position, allowing multiple detections without requiring multiple separate workpieces. The grooves are positioned at different locations radially from the center, enabling sequential testing while preserving material.
Solution Approach 2:
The invention performs preliminary test cuts to form grooves that serve as reference features for blade position detection. These preliminary grooves are created before actual production cutting, allowing the system to calibrate and verify blade positioning accuracy. The grooves act as pre-prepared measurement markers that enable accurate detection without consuming additional workpieces during the detection phase.
2Strength
If thick cutting blades are used for edge trimming, then the cutting strength is improved, but the number of grooves that can be formed on a single workpiece decreases
Solution Approach 1:
The invention transitions from forming grooves in a single radial dimension to utilizing multiple radial dimensions by positioning grooves at different radii from the center. This dimensional approach allows thick cutting blades to create multiple non-overlapping grooves by varying the radial position, thereby increasing the number of detectable grooves on a single workpiece without reducing blade thickness or strength.
Data Source
AI summary
A cutting blade position detecting method using a cutting apparatus including a holding table that holds a workpiece, and a cutting unit in which a cutting blade for cutting the workpiece held by the holding table is mounted in a rotatable state, includes a groove forming step of causing the cutting blade to further cut into the workpiece including a first groove formed by causing the cutting blade to cut into the workpiece, to form the workpiece with a second groove of which one end portion in a width direction does not overlap with the first groove whereas another end portion in the width direction overlaps with the first groove, and a calculating step of calculating the lower end position of the cutting blade based on a length of the one end portion in the width direction of the second groove formed in the workpiece.