Blanking Apparatus for Charged Particle Beam Dose Control
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Solution Overview
Problem
Existing drawing apparatuses face challenges in achieving high precision gradation control of charged particle beam doses due to variations in beam intensities, which hinder precise pattern formation on substrates during semiconductor device manufacturing.
Innovation Solution
A blanking apparatus comprising a plurality of blankers and a driving device that adjusts the combination and intensity of charged particle beams to control the dose at specific positions on a substrate, using a blanking deflector with electrostatic blankers and a control system to manage the ON/OFF states of charged particle beams based on detected intensities and gradation levels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a plurality of charged particle beams are used to perform gradation control on dose, then the drawing precision can be improved, but the variation in beam intensities makes it difficult to achieve high precision dose control
Solution Approach 1:
The patent applies feedback by detecting the intensity of each charged particle beam and using this information to determine the optimal combination of beams for achieving the desired dose. The control unit adjusts the beam combination based on actual measured intensities, creating a closed-loop system that compensates for intensity variations and ensures precise dose control despite manufacturing tolerances in the beam system.
Solution Approach 2:
The patent changes the parameter of beam combination rather than relying on uniform beam intensities. By selecting different combinations of charged particle beams based on their detected intensities, the system achieves the desired dose distribution. This approach transforms the problem from controlling individual beam intensities to controlling the aggregate effect of multiple beams with varying parameters.
2Ease of operation
If the intensities of charged particle beams are assumed to be uniform, then the gradation control can be simplified, but in practice the intensities vary making high precision control difficult
Solution Approach 1:
The patent performs preliminary detection of beam intensities before the actual drawing process. By measuring and storing the intensity of each beam in advance, the system prepares the necessary information to compensate for intensity variations during operation. This preliminary action allows the control unit to select appropriate beam combinations that achieve the desired dose without requiring real-time intensity measurements during drawing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-precision gradation control of charged particle beam doses, ensuring accurate pattern formation even with non-uniform beam intensities by adjusting the number and combination of beams, thereby improving the precision and quality of semiconductor device manufacturing.
Implementation Method 1
a blanking deflector with electrostatic blankers
Data Source
AI summary
The present invention provides a blanking apparatus comprising a plurality of blankers configured to respectively blank a plurality of beams with respect to a target position on an object, and a driving device configured to drive the plurality of blankers, wherein the driving device includes a change device configured to change relation between a combination of beams of the plurality of beams, and a target dose.