Blazed Concave Grating Segmentation for Groove Profile Precision

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Solution Overview

Problem

The existing replication methods for blazed concave gratings face challenges in precisely controlling the groove profile, leading to reduced diffraction efficiency and limited application due to the geometric constraints of concave substrates, which affects the quality of optical spectrum instruments.

Innovation Solution

The method involves dividing a whole replication grating blank into two identical blocks, replicating them separately, and then splicing them to form a concave grating, using a convex blazed master grating formed through sensitization, holographic exposure, and ion beam etching, with a segmentation sheet made of polyethylene, and ensuring precise alignment and spacing to maintain diffraction efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a blazed concave grating is pulled along the vertical direction after replication by a convex master grating, then the groove profile can be obtained, but the diffraction efficiency is greatly affected

Engineering Contradiction:
Improvegroove profile precisionVSAvoiddiffraction efficiency
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The concave grating blank is divided into two separate blocks that are replicated independently from the convex master grating. Each block is then pulled separately along the vertical direction to form the concave groove profile. This segmentation allows each block to be processed independently, avoiding the distortion that occurs when the entire grating is pulled as a single unit, thereby maintaining diffraction efficiency while achieving the required groove profile precision.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If ion beam etching is used to directly etch a concave grating, then the groove profile can be controlled, but the geometric shape restriction of the concave substrate makes it difficult or impossible

Engineering Contradiction:
Improvegroove profile controlVSAvoidsubstrate geometric constraint
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

Instead of directly etching the concave grating substrate (which is difficult due to geometric constraints), the invention uses a convex master grating as a template and replicates the concave grating profile through contact molding. The convex master grating is first fabricated with precise groove profiles using ion beam etching on a flat substrate, then this convex master is used to create the concave grating blanks through replication. This inverted approach (creating convex first, then replicating concave) overcomes the substrate geometric constraint while maintaining groove profile precision.

Inventive Principle:
Principle #13The other way round (Inversion)

3Ease of manufacture

If a convex master grating is used to replicate a concave grating, then the manufacturing process is simplified, but the blazed angle causes the diffraction efficiency to be greatly affected

Engineering Contradiction:
Improvereplication process simplicityVSAvoiddiffraction efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The concave grating blank is divided into two separate blocks that are replicated independently from the convex master grating. Each block is then pulled separately along the vertical direction to form the concave groove profile. This segmentation allows each block to be processed independently, avoiding the distortion that occurs when the entire grating is pulled as a single unit, thereby maintaining diffraction efficiency while achieving the required groove profile precision.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach avoids the impact on diffraction efficiency caused by traditional replication methods, allowing for improved precision and quality of blazed concave gratings, enhancing their application in optical spectrum instruments.

Implementation Method 1

the convex blazed master grating substrate is first subjected to holographic exposure, to obtain a convex photoresist mask grating

Methodology Applied
Scientific EffectHolographic exposure: Photography

Implementation Method 2

ion beam etching is conducted on the developed photoresist master grating to obtain the convex blazed master grating

Methodology Applied
Scientific EffectIon beam etching: Ion Beam

Implementation Method 3

the convex blazed master grating after evaporation is placed on a platform in a drying oven, epoxy resin is poured onto the convex blazed master grating, and the concave grating substrate is pressed thereon

Methodology Applied
Scientific EffectSeparation layer: Lubrication

Implementation Method 4

after leveling and bubble removal, the drying oven is heated to a suitable curing temperature, and after the epoxy resin is cured, the master grating is taken out from the drying oven

Methodology Applied
Scientific EffectCuring: Photopolymerisation

Data Source

PatentUS9470824B2Manufacture method for blazed concave grating
Publication Date: 2016.10.18 BEAMWAY OPTICAL TECH CO LTD
  • US9470824B2 patent drawing
  • US9470824B2 patent drawing
  • US9470824B2 patent drawing

AI summary

A manufacture method for a blazed concave grating is provided, including: replicating a blazed concave grating by means of a replication process, after the replication is completed, conducting heat preservation and cooling, then separating two gratings (G1, G2) by using different pulling manners respectively, and finally splicing the replicated and separated concave grating blanks, to obtain a required blazed concave grating. This manufacture method can solve the problem of a big error in an existing replication method for a blazed concave grating.