Bleed Valve Structure for Compact Low-Cost Fluid Control

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Solution Overview

Problem

Existing valve devices for fluid control in manufacturing processes, such as semiconductor manufacturing, face challenges in incorporating a bleed function without increasing manufacturing complexity and cost, as adding a bleed hole requires machining, which complicates production and raises costs.

Innovation Solution

A valve device design featuring a block-shaped valve body with an accommodation recess containing a valve element, a primary flow path, a secondary flow path, and a bleed hole that allows communication between the secondary flow path and a detour passage, enabling a bleed function without direct machining of the valve body, thus maintaining compactness and reducing costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a bleed hole is formed by machining into the valve body to add bleed function, then the bleed function is achieved, but the manufacturing complexity and cost increase

Engineering Contradiction:
Improvebleed functionVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The valve body is divided into multiple components including a valve element, valve seat, and holder. The bleed hole is formed in the holder component rather than the main valve body, allowing independent manufacturing and assembly. This segmentation enables the bleed function to be added without complicating the overall valve body manufacturing process.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The holder acts as an intermediary component that provides the bleed hole function. Instead of directly machining the bleed hole into the valve body, the holder is positioned between the valve element and valve body, providing the necessary bleed pathway while simplifying the main valve body structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If a bleed hole is formed by machining into the valve body to add bleed function, then the bleed function is achieved, but the device cost increases

Engineering Contradiction:
Improvebleed functionVSAvoiddevice cost
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

By segmenting the valve into manufacturable components with the bleed hole in the holder, standard manufacturing processes can be used for each part. This avoids costly custom machining of the entire valve body and allows for more economical production methods.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The holder component with the integrated bleed hole can be manufactured as a separate, potentially simpler part that is easier and cheaper to produce than modifying the main valve body structure. This component can be replaced or manufactured independently at lower cost.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Volume of moving object

If the valve device is made compact, then the device size is reduced, but adding bleed function through body machining increases complexity

Engineering Contradiction:
Improvedevice sizeVSAvoidmanufacturing complexity
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The holder component containing the bleed hole is nested within the valve assembly structure. This allows the bleed function to be integrated into the existing compact valve design without adding external complexity or increasing the overall device volume.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The segmented design allows each component to be optimized for its specific function while maintaining overall compactness. The holder with the bleed hole is a small, integrated component that fits within the existing valve structure without requiring additional space.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11365830B2Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device
Publication Date: 2022.06.21 FUJIKIN INC
  • US11365830B2 patent drawing
  • US11365830B2 patent drawing
  • US11365830B2 patent drawing

AI summary

A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.