Block-Based Semiconductor Scheduling System

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Solution Overview

Problem

Manufacturing facilities face challenges in adapting traditional scheduling systems to changing environments due to their inflexibility, high maintenance costs, and the need for specialized technical expertise, which hinders efficient management of complex production processes and meets increasing demand for products.

Innovation Solution

The implementation of block-based workflows allows end-users to create customizable scheduling systems that can be easily modified without programming knowledge, enabling the generation of schedules for semiconductor manufacturing environments by specifying operations, data extraction, allocation, and processing orders, and facilitating troubleshooting.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If custom-built scheduling systems are implemented, then scheduling functionality is provided, but maintenance difficulty increases and flexibility decreases

Engineering Contradiction:
Improvescheduling system flexibilityVSAvoidsystem maintenance ease
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The scheduling system is divided into discrete, reusable blocks that can be independently configured and maintained. Each block represents a specific scheduling function or parameter, allowing individual modification without affecting the entire system. This segmentation enables users to make targeted adjustments while simplifying maintenance through modular components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent creates a universal block-based framework where standardized blocks can serve multiple scheduling purposes across different manufacturing scenarios. These reusable blocks provide versatile scheduling functionality that can be applied to various equipment and processes, reducing the need for custom development while maintaining adaptability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of manufacture

If commercial scheduling systems are purchased, then scheduling capability is obtained, but customization ability is lost

Engineering Contradiction:
Improvescheduling system implementationVSAvoidsystem customization capability
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The scheduling system employs dynamic, configurable blocks that can be easily adjusted to match changing manufacturing requirements. Users can modify block parameters, add or remove blocks, and reconfigure workflows without requiring vendor intervention or complex programming, enabling the system to adapt dynamically to new applications and tool improvements.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The block-based architecture empowers end-users to perform their own customization and modification of the scheduling system without needing external vendor support or specialized programming expertise. Users can directly configure blocks to meet their specific needs, making the system self-sufficient and highly adaptable.

Inventive Principle:
Principle #25Self-service

3Productivity

If traditional scheduling systems are used, then production scheduling is performed, but adaptation to changes requires significant time and cost

Engineering Contradiction:
Improveproduction scheduling efficiencyVSAvoidsystem modification time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The system pre-configures standardized scheduling blocks that are ready for immediate deployment. These pre-built blocks contain common scheduling logic and parameters, allowing users to quickly assemble functional schedules without extensive development time. When changes are needed, users can simply modify existing blocks rather than building from scratch.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The block-based system enables rapid adaptation through simple parameter modifications within blocks. Users can adjust scheduling parameters, constraints, and priorities by changing block configurations rather than rewriting scheduling logic, dramatically reducing the time and cost required to adapt to production changes.

Inventive Principle:
Principle #35Parameter changes

4Adaptability or versatility

If custom-built scheduling systems are implemented, then specific scheduling needs are met, but technical expertise requirements increase

Engineering Contradiction:
Improvescheduling system adaptabilityVSAvoiduser expertise requirement
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The block-based interface acts as an intermediary layer between the complex scheduling engine and the end-user. This abstraction shields users from underlying complexity by providing intuitive, pre-configured blocks that hide sophisticated scheduling algorithms and logic, allowing users to achieve advanced scheduling functionality without requiring deep technical expertise.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS10295979B2Scheduling in manufacturing environments
Publication Date: 2019.05.21 APPLIED MATERIALS INC
  • US10295979B2 patent drawing
  • US10295979B2 patent drawing
  • US10295979B2 patent drawing

AI summary

Embodiments presented herein provide techniques for executing a block-based workflow to provide a schedule for a semiconductor manufacturing environment. The block-based workflow includes a plurality of blocks and each block specifies a set of operations to be performed upon execution of each block. One embodiment includes extracting scheduling data from the semiconductor manufacturing environment, determining an allocation of the number of lots to one or more devices operating in the semiconductor manufacturing environment, determining an order in which the lots should be processed by the one or more devices and publishing results of the allocation and processing order to at least one another device in the semiconductor manufacturing environment, based on the plurality of blocks in the block-based workflow.