Self-Assembling Block Copolymer Multilayer Antireflection Coatings
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Solution Overview
Problem
Conventional antireflective coatings in semiconductor processing, such as BARC and DARC, are ineffective at absorbing all reflected light and are costly and time-intensive to produce, limiting the precision and efficiency of photo imaging processes, especially when dealing with non-planar substrates.
Innovation Solution
The use of self-assembling block copolymers, which form multilayer antireflection layers through a single annealing step, effectively absorbing light from various angles by creating periodic structures at nanometer-scale dimensions, thereby improving the efficiency and reducing the cost and time required for coating deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If conventional single-layer antireflective coatings (BARC or DARC) are used, then the process is simple and cost-effective, but the light absorption efficiency is insufficient (only 90% effective at absorbing reflected light from a single angle)
Solution Approach 1:
The patent divides the antireflective coating into multiple alternating layers of block copolymer and homopolymer, creating a segmented multilayer structure. This segmentation allows each layer to contribute to light absorption from different angles, achieving superior light absorption efficiency (exponentially increasing absorption) compared to single-layer coatings, while the self-assembling process keeps the manufacturing complexity manageable.
Solution Approach 2:
The patent employs composite materials by combining block copolymers with homopolymers to form a multilayer antireflective coating. The block copolymer provides the self-assembling capability to form periodic structures, while the homopolymer components contribute to the overall light absorption properties. This composite approach enables the coating to absorb light from multiple angles effectively.
2Loss of energy
If double-layer antireflective coatings are formed by vacuum evaporation to improve light absorption efficiency, then the light absorption effectiveness increases exponentially, but the manufacturing cost and time increase significantly
Solution Approach 1:
The patent merges multiple coating deposition steps into a single spin-coating process. By combining the block copolymer and homopolymer into a single coating solution that is applied in one step, the process achieves multilayer light absorption efficiency without requiring multiple separate deposition operations. This eliminates the time-consuming sequential deposition process while maintaining the exponential light absorption improvement.
Solution Approach 2:
The patent utilizes self-service through self-assembly, where the block copolymer components automatically organize into periodic multilayer structures after a single annealing step. This self-organizing behavior eliminates the need for complex, time-intensive deposition processes, as the structure forms autonomously from the single applied coating layer.
3Measurement precision
If conventional antireflective coatings are used on non-planar substrates, then the process is simple, but the reflected light scatters and inadvertently exposes surrounding photoresist regions, reducing imaging precision
Solution Approach 1:
The patent applies local quality by creating a coating that adapts to local substrate variations. The self-assembling block copolymer structure forms periodic patterns that conform to the local substrate topology, providing consistent light absorption properties across non-planar surfaces. This local adaptation ensures that reflected light is absorbed regardless of substrate curvature or irregularities, preventing scattered light from exposing surrounding photoresist regions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The self-assembling block copolymer antireflection layers significantly enhance the absorption of reflected light, improving the accuracy and precision of photo imaging processes while being more cost-effective and efficient than traditional multilayer coatings.
Implementation Method 1
The use of self-assembling block copolymers, which form multilayer antireflection layers through a single annealing step
Implementation Method 2
which form multilayer antireflection layers through a single annealing step
Implementation Method 3
effectively absorbing light from various angles by creating periodic structures at nanometer-scale dimensions
Data Source
AI summary
Multi-layer antireflection coatings, devices including multi-layer antireflection coatings and methods of forming the same are disclosed. A block copolymer is applied to a substrate and self-assembled into parallel lamellae above a substrate. The block copolymer may optionally be allowed to self-assemble into a multitude of domains oriented either substantially parallel or substantially perpendicular to an underlying substrate.