Block Copolymer Assembly for Bit Patterned Media
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Solution Overview
Problem
The use of multiple overlays in block copolymer template fabrication for bit patterned media leads to increased processing time and quality issues due to misalignments and mismatched layer thicknesses.
Innovation Solution
A block copolymer assembly method that integrates both data and servo zones using a single set of patterned thin film guides, allowing for simultaneous ordering of block copolymers across the substrate, thereby eliminating the need for multiple overlays and reducing processing time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple overlays are used to create data zones and servo zones separately, then the fabrication process can create both zones, but the processing time increases and quality issues occur due to misalignments and mismatched layer thicknesses
Solution Approach 1:
The patent combines the fabrication of data zones and servo zones into a single overlay process. The block copolymer assembly simultaneously forms both data regions and servo regions in one step, eliminating the need for separate overlay processes and their associated alignment issues and time delays.
Solution Approach 2:
The single overlay system is designed to perform multiple functions: it creates both data zones with magnetic dots and servo zones with trenches simultaneously. This multi-functional approach replaces the need for multiple specialized overlays, reducing processing complexity and time while maintaining precision.
2Manufacturing precision
If multiple overlays are used to create data zones and servo zones separately, then the fabrication process can create both zones, but the processing complexity and quality control difficulty increase
Solution Approach 1:
The patent merges multiple fabrication steps into a single block copolymer assembly process that simultaneously creates data zones and servo zones. This consolidation reduces process complexity while ensuring uniform layer thickness across both zone types, as they are formed in the same process window.
3Reliability
If multiple overlays are used to create data zones and servo zones separately, then the fabrication process can create both zones, but the quality issues increase due to misalignments and mismatched layer thicknesses
Solution Approach 1:
The patent combines the creation of data zones and servo zones into a single simultaneous process using block copolymer self-assembly. This eliminates the sequential overlay process that causes misalignments and thickness variations, thereby improving fabrication quality and reliability while reducing the time required for multiple processing steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in a faster, more accurate, and simplified fabrication method for high-density patterned templates, ensuring uniform layer thickness and improved quality by eliminating overlay misalignments and reducing processing time.
Implementation Method 1
A disordered block copolymer coating on the patterned thin film layers is assembled into an ordered block copolymer assembly of periodic structures directed by the transferred first and second patterned features simultaneously in the data and servo zones
Data Source
AI summary
The embodiments disclose a block copolymer assembly structure, including a first pattern and second pattern with a first density of patterned features integrated in data and servo zones, a silicon substrate with thin film layers deposited thereon and patterned using the first density of first pattern and second pattern features and a template fabrication pattern with a second density greater than the first density created using ordered block copolymer periodic structures across a portion of the substrate.