Block Copolymer Intermediate for DSA Molecular Weight Control
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Solution Overview
Problem
The semiconductor industry faces challenges in achieving precise control of molecular weight and dispersion in block copolymers for Directed Self-Assembly (DSA) techniques, as existing methods like living anionic polymerization are sensitive to impurities and limited in monomer selectivity, affecting pattern size and precision.
Innovation Solution
A block copolymer intermediate with a specific structure is synthesized using a method involving living anionic polymerization and a coupling agent, allowing for precise control of molecular weight and dispersion of polymer blocks, enabling the production of block copolymers with narrow molecular weight distribution suitable for DSA techniques.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If living anionic polymerization method is used to obtain block copolymer with low degree of dispersion, then molecular weight distribution is narrowed, but the method becomes highly sensitive to water and oxygen impurities, making precise control difficult
Solution Approach 1:
The patent introduces a coupling agent as an intermediary substance that reacts with the anionic polymerization initiator to form a protected complex. This intermediary structure reduces the sensitivity to water and oxygen while maintaining the ability to control molecular weight distribution, thus resolving the contradiction between achieving narrow distribution and reducing impurity sensitivity
Solution Approach 2:
The patent applies preliminary protection to the anionic polymerization initiator by forming a complex with the coupling agent before the actual polymerization process. This preliminary action creates a more stable system that is less sensitive to impurities, allowing precise control of molecular weight distribution to be achieved without the harmful sensitivity effects
2Ease of manufacture
If conventional initiation method with alkyllithium is used, then the synthesis process is simple, but selectivity of monomers is limited and molecular weight control is affected by impurities
Solution Approach 1:
The patent changes the chemical parameters of the initiation system by introducing a coupling agent with specific functional groups. This parameter change enables the system to maintain simplicity while expanding monomer selectivity, as the coupling agent can be designed to match different monomer requirements without complicating the overall synthesis process
3Manufacturing precision
If block copolymer is synthesized with precise molecular weight control, then DSA technique performance is improved, but the synthesis becomes more sensitive to reaction conditions and impurities
Solution Approach 1:
The coupling agent serves as a protective intermediary that stabilizes the anionic polymerization initiator. This intermediary structure allows precise molecular weight control to be achieved while reducing the harmful effects of sensitivity to impurities, thereby maintaining reaction stability throughout the synthesis process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method provides block copolymers with precise molecular weight control and narrow distribution, enhancing their suitability for DSA techniques by reducing the impact of impurities and improving synthesis efficiency.
Implementation Method 1
a first monomer is polymerized and then a second monomer is successively polymerized to synthesize a block copolymer
Data Source
AI summary
Provided are a block copolymer having a narrow molecular weight distribution such that the copolymer can be used in a DSA technique, a block copolymer intermediate thereof, and methods for producing the same. A block copolymer intermediate represented by the general formula (1) or (2):wherein, in the formulae (1) and (2), each of R1 and R3 independently represents a polymerization initiator residue, each of R2 and R4 independently represents an aromatic group or an alkyl group, Y1 represents a polymer block of (a)an (meth)acrylic acid ester, Y2 represents a polymer block of styrene or a derivative thereof, L represents an alkylene group or a phenylene group, X represents a halogen group, and each of m and n independently represents an integer of 1 to 5.