Block Copolymer Phase Separation via Ion Liquid Vaporization
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Solution Overview
Problem
Current methods for forming phase-separated structures using block copolymers, such as those with styrene and methyl methacrylate blocks, face challenges in improving phase-separation performance and achieving smooth surface roughness.
Innovation Solution
A method involving a resin composition that includes a block copolymer and an ion liquid with a cation and anion moiety, where the ion liquid is vaporized to enhance phase-separation performance and reduce surface roughness by forming a BCP layer on a substrate and then undergoing annealing to achieve a phase-separated structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of stationary object
If the molecular weight of the block copolymer is increased to form a structure with a larger period, then the period of the structure increases, but the phase-separation performance deteriorates and surface roughness increases
Solution Approach 1:
The patent changes the chemical composition parameters of the block copolymer, specifically using a styrene block copolymer with controlled molecular weight and composition ratios. By adjusting the polymerization degree and block composition, the patent achieves optimal phase-separation performance while maintaining desired period dimensions, resolving the contradiction between structure size and phase-separation quality
Solution Approach 2:
The patent creates a composite system by combining the block copolymer with a specific substrate having controlled chemical state and surface properties. This composite approach enables both position control and orientational control of the phase-separated structure, achieving good phase-separation performance and smooth surface roughness while maintaining the required period
2Ease of manufacture
If conventional block copolymers are used for self-assembly, then the formation process is simple, but the phase-separation performance cannot be further improved and surface roughness is high
Solution Approach 1:
The patent optimizes specific parameters of conventional block copolymers, including molecular weight, block composition ratio, and chemical structure. These parameter adjustments maintain the simplicity of the self-assembly process while significantly improving phase-separation performance and reducing surface roughness
Solution Approach 2:
The patent introduces a substrate with controlled chemical state as an intermediary that mediates the self-assembly process. This substrate provides chemical epitaxy effects that enhance phase-separation performance and control the morphology of the resulting structure, achieving high manufacturing precision without complicating the formation process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables the formation of phase-separated structures with improved phase-separation performance and reduced surface roughness, allowing for the creation of structures with good shape and fine patterns while maintaining the original period of the structure.
Implementation Method 1
a step of vaporizing at least a part of the compound (IL)
Implementation Method 2
phase-separating the BCP layer to obtain a structure containing a phase-separated structure
Implementation Method 3
undergoing annealing to achieve a phase-separated structure
Implementation Method 4
a technology for processing a more delicate structure is demanded. In response to such demand, development has been conducted on a technology in which a fine pattern is formed using a phase-separated structure formed by self-assembly of a block copolymer
Implementation Method 5
it is necessary to form a self-organized nano structure by a microphase separation only in specific regions
Data Source
AI summary
A method of producing a structure containing a phase-separated structure, including: a step of using a resin composition for forming a phase-separated structure including a block copolymer and an ion liquid containing a compound (IL) having a cation moiety and an anion moiety to form a BCP layer (3) containing a block copolymer on a substrate (1); and a step of vaporizing at least a part of the compound (IL), and phase-separating the BCP layer (3) to obtain a structure (3′) containing a phase-separated structure.