Block Copolymer Lithography Template Design for Domain Position Uncertainty

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Solution Overview

Problem

There is uncertainty in the position of domains within self-assembled block copolymer features, which affects the accuracy of feature placement on substrates, limiting the minimum feature size and pitch separation achievable in device manufacturing.

Innovation Solution

A method is developed to calculate and adjust for the uncertainty in domain position within block copolymer features, using parameters such as the length of polymer types and offsets between designed and actual self-assembly locations, to improve the accuracy of self-assembly processes and template design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If self-assembly of block copolymer is used to reduce feature size, then feature resolution is improved, but uncertainty in domain position increases

Engineering Contradiction:

Improvefeature resolutionVSAvoiddomain position uncertainty

Core Design Contradiction:

Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent calculates domain position uncertainty based on polymer length and offset parameters, then uses this calculated uncertainty as feedback to adjust the template design. This iterative process allows optimization of template features to compensate for self-assembly variations, thereby resolving the contradiction between achieving high resolution and managing position uncertainty.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent systematically varies parameters such as polymer block length, composition ratios, and template geometry to optimize the balance between feature resolution and domain position uncertainty. By changing these parameters, the system can achieve smaller features while accounting for and compensating for position variations through calculated uncertainty margins.

Inventive Principle:

Principle #35Parameter changes

2Productivity

If feature size is reduced to increase density, then device concentration is improved, but domain position control deteriorates

Engineering Contradiction:

Improvefeature densityVSAvoiddomain position control

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent performs preliminary calculation of domain position uncertainty before finalizing the template design and self-assembly process. By calculating the expected uncertainty based on polymer characteristics and offset parameters in advance, the template can be pre-adjusted to compensate for anticipated position variations, enabling high density packaging while maintaining acceptable position control.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The calculated uncertainty information serves as feedback that guides the optimization of template geometry and spacing. This allows the design to accommodate higher feature densities while maintaining domain position control within acceptable limits by adjusting template features based on the quantified uncertainty.

Inventive Principle:

Principle #23Feedback

3Manufacturing precision

If template design is adjusted to account for uncertainty, then feature placement accuracy is improved, but design complexity increases

Engineering Contradiction:

Improvefeature placement accuracyVSAvoiddesign complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces complex iterative trial-and-error design adjustments with a analytical calculation-based approach. By using mathematical models to calculate domain position uncertainty based on polymer length and offset parameters, the system determines appropriate template adjustments through calculation rather than extensive mechanical experimentation, thereby improving placement accuracy while managing design complexity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the confidence in feature placement on substrates, allowing for smaller feature sizes and tighter pitch separations, thereby improving the manufacturing of devices using self-assemblable block copolymers.

Implementation Method 1

it may undergo an order-disorder transition on cooling below a certain temperature (order-disorder transition temperature To/d) resulting in phase separation of copolymer blocks

Methodology Applied

Scientific EffectOrder-disorder transition: Phase Change

Implementation Method 2

The use of self-assembly of a block copolymer (BCP) has been considered as a potential method for increasing the feature resolution

Methodology Applied

Scientific EffectSelf-assembly: Self-Assembly

Data Source

PatentUS10884333B2Method of designing lithography features by self-assembly of block copolymer

Publication Date: 2021.01.05 ASML NETHERLANDS BV

AI summary

A method of design or verification for a self-assemblable block copolymer feature, the block copolymer feature including a first domain having a first polymer type and a second domain having a second polymer type, the method including, based on the length of the second polymer type or on an uncertainty in position of the first domain within the block copolymer feature calculated based on the length of the second polymer type, adjusting a parameter of the self-assembly process of a block copolymer feature or verifying a placement of a block copolymer feature.